The manufacture of microlenses by melting photoresist

Measurement Science and Technology

Volumn 1, Issue 8, 1990, Pages 759-766

  Daly, D ^a   Stevens, R F ^a   Hutley, M C ^a   Davies, N ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

MICROLENSES; NUMERICAL APERTURES;

PHOTOGRAPHY; PHOTORESISTS;

LENSES;

EID: 0025471413     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/1/8/016     Document Type: Article

References (15)

1. Fresnel phase plate lenses for through-wafer optical interconnections
2. Optical Techniques for the Generation of Microlens Arrays
3. Design Of Photopolymer Holograms For Optical Interconnect Applications
4. Technique for monolithic fabrication of microlens arrays