Local-Oxidation-Induced Stress Measured by Raman Microprobe Spectroscopy

Journal of the Electrochemical Society

Volumn 137, Issue 6, 1990, Pages 1987-1989

  Kobayashi, K ^a   Inoue, Y ^a   Nishimura, T ^a   Hirayama, M ^a   Akasaka, Y ^a   Kato, T ^a   Ibuki, S ^b  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

^b SETSUNAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

SILICA - STRESSES; SPECTROSCOPY, RAMAN; STRESSES - MEASUREMENTS;

FIELD EDGES; RAMAN MICROPROBE SPECTROSCOPY;

SEMICONDUCTING SILICON;

EID: 0025445650     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2086845     Document Type: Article

References (19)

1. J. A. Appels, E. Kooi, M. M. Paffen, J. J. H. Schatorje, and W. H. G. G. Verkuylen, Philips Res. Rep., 25, 118 (1970).
2. A. Bohg and A. K. Gaind, Appl. Phys. Lett., 33, 895 (1978).
3. K. Shibata and K. Taniguchi, Journal of the Electrochemical Society, 127, 1383 (1980).
4. Y. Tamaki, S. Isomae, S. Mizuno, and H. Higuchi, Journal of the Electrochemical Society, 128, 644 (1981).
5. Y. Tamaki, S. Isomae, S. Mizuno, and H. Higuchi, Journal of the Electrochemical Society, 130, 2266 (1983).
6. D. Chin, S. Y. Oh, Sm. M. Hu, and R. W. Dutton, IEEE Trans. Electron Devices, ED-30(7), 744 (1983).
7. H. Matsumoto and M. Fukuma, IEEE Trans. Electron Devices, ED-32(2), 132 (1985).
8. S. Isomae, S. Yamamoto, S. Aoki, and A. Yajima, IEEE Electron Device Lett., EDL-7, 368 (1986).
9. T. Hirao, K. Kijima, and T. Nakano, in “Semiconductor Silicon 1977,” PV 77–2, H. R. Huff and E. Sirtl, Editors, p. 1005, The Electrochemical Society Softbound Proceedings Series, Princeton, NJ (1977).
10. E. Anastassakis, A. Pinczuk, E. Burstein, F. H. Pollak, and M. Cardona, Solid State Commun., 8, 133 (1970).
11. I.I. Novak, V. V. Baptizmanskii, and L. V. Zhoga, Opt. Spectrosc. (USSR), 43(2), 145 (1977).
12. Th. Englert, G. Abstreiter, and J. Pontcharra, Solid-State Electron., 23, 31 (1980).
13. J. R. Patel and N. Kato, J. Appl. Phys., 44, 971 (1973).
14. E. P. EerNisse, Appl. Phys. Lett., 35, 8 (1979).
15. E. A. Irene, E. Tierney, and J. Angilello, Journal of the Electrochemical Society, 129, 2594 (1982).
16. B. Leroy, Philos. Mag. B, 55(2), 159 (1987).
17. S. Isomae, J. Appl. Phys., 52, 2782 (1981).
18. J. Mitsuhashi, S. Nakao, and T. Matsukawa, Inter. Electron Device Meeting Technical Digest, 50 (1986).
19. H. Mikoshiba, Solid-State Electron, 24, 221 (1981).