The Evolution of Silicon Wafer Cleaning Technology

Journal of the Electrochemical Society

Volumn 137, Issue 6, 1990, Pages 1887-1892

  Kern, Werner ^a  

^a LAM RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; INTEGRATED CIRCUITS, VLSI; SURFACES - CLEANING;

SILICON WAFERS;

SEMICONDUCTING SILICON;

EID: 0025445393     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2086825     Document Type: Article

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