Surface defects in GaAs wafer processes

Journal of Crystal Growth

Volumn 103, Issue 1-4, 1990, Pages 448-455

  Matsushita, H ^a   Ishida, M ^a   Kikawa, J ^a  

^a FURUKAWA ELECTRIC CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSCOPIC EXAMINATION--SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICES--PROCESSING; SURFACES--POLISHING;

MIRROR WAFERS;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0025437071     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-0248(90)90225-A     Document Type: Article

References (2)