Strength Characterization of Silicon Microprobes in Neurophysiological Tissues

IEEE Transactions on Biomedical Engineering

Volumn 37, Issue 5, 1990, Pages 474-481

  Najafi, Khalil ^a   Hetke, Jamille F ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL EQUIPMENT--MICROELECTRODES; ELECTRODES--SUBSTRATES; MICROPROCESSOR CHIPS; SEMICONDUCTING SILICON; STRESSES;

IMPLANTABLE ELECTRODES; NEUROPHYSIOLOGICAL TISSUES; SILICON FRACTURE STRESS; SILICON MICROPROBES; THIN SILICON STRUCTURES;

BIOMEDICAL ENGINEERING;

ANIMAL EXPERIMENT; ARTICLE; GUINEA PIG; METHODOLOGY; MICROELECTRODE; NEUROPHYSIOLOGY; NONHUMAN; RAT; SWINE;

ANIMAL; ELECTRIC CONDUCTIVITY; EQUIPMENT DESIGN; GUINEA PIGS; MATERIALS TESTING; MICROELECTRODES; NEUROPHYSIOLOGY; RATS; SILICON; SUPPORT, U.S. GOV'T, P.H.S.;

EID: 0025435155     PISSN: 00189294     EISSN: 15582531     Source Type: Journal    
DOI: 10.1109/10.55638     Document Type: Article

References (16)

1. K. Frank, M. C. Becker, “Microelectrodes for recording and stimulation,” in Physical Techniques in Biological Reseurch, Vol. 5, W. L. Nastuk, Ed. New York: Academic, 1964, ch. 2.
2. F. T. Hambrecht and J. B. Reswick, Functional Electrical Stimulation: Applications in Neural Prosthesis. New York: Marcel Dekker, 1977.
3. F. B. Simmons, “Electrical stimulation of the auditory nerve in man,” Arch. Otolaryngol., vol. 84, pp. 24–76, 1966.
4. G. Brindley and W. Lewin, “The sensations produced by electrical stimulation of the visual cortex,” J. Phys., vol. 195, pp. 479–493, 1963.
5. J. Kruger, “Simultaneous recordings from many cerebral neurons: Techniques and results,” Rev. Physiol. Biochem. Pharmacol., vol. 98, pp. 177–233, 1983.
6. R. Plonsey, Bioelectric Phenomena. New York: McGraw-Hill, 1969, ch. 5.
7. K. D. Wise, J. B. Angell, and A. Starr, “An integrated-circuit approach to extracellular microelectrodes,” IEEE Trans. Biomed. Eng., vol. BME-17, pp. 238–247, July 1970.
8. K. Najafi, K. D. Wise, and T. Mochizuki, “A high-yield IC-compatible multichannel recording array,” IEEE Trans. Electron Devices, vol. ED-32, no. 7, pp. 1206–1211, July 1985.
9. K. Najafi and K. D. Wise, “An implantable multielectrode array with on-chip signal processing,” IEEE J. Solid-State Circuits, vol. SC-21, no. 6, pp. 1035–1044, Dec. 1986.
10. S. L. BeMent, K. D. Wise, D. J. Anderson, K. Najafi, and K. L. Drake, “Solid-state electrodes for multichannel multiplexed intra-cortical neuronal recording,” IEEE Trans. Biomed. Eng., vol. BME-33, pp. 230–241, Feb. 1986.
11. D. J. Anderson, K. Najafi, S. J. Tanghe, D. A. Evans, K. L. Levy, J. F. Hetke, X. Xue, J. J. Zappia, and K. D. Wise, “Batch-fabricated thin-film electrodes for stimulation of the central auditory system,” IEEE Trans. Biomed. Eng., vol. BME-36, pp. 673–704, July 1989.
12. K. L. Drake, K. D. Wise, J. Farraye, D. J. Anderson, and S. L. BeMent, “Performance of planar multisite microprobes in recording extracellular single-unit intracortical activity,” IEEE Trans. Biomed. Eng., vol. BME-35, pp. 719–733, Sept. 1988.
13. F. V. Warnock and P. P. Benham, Mechanics of Solids and Strength of Materials. London: Pitman, 1965.
14. G. L. Pearson, W. T. Read, Jr., W. L. Feldman, “Deformation and fracture of small silicon crystals,” Acta Metallurgies, vol. 5, pp. 181–191. Apr. 1957.
15. E. Obermeir, P. Kopystynski, and R. Niebl, “Characteristics of Polysilicon Layers and Their Application in Sensors,” Tech. Dig., Solid-State Sensor and Actuator Workshop, Hilton Head. SC. June 1986.
16. H. Yamada, Strength of Biological Materials. F. G. Evans. Ed. Baltimore. MD: Williams & Wilkins, 1970.