How to liberate integrated sensors from encapsulation stress

Sensors and Actuators: A. Physical

Volumn 23, Issue 1-3, 1990, Pages 908-910

  Halg B ^a   Popovic, R S ^a  

^a Landis and Gyr Communications Corp   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONICS; SEMICONDUCTING SILICON; SENSORS; STRESSES;

INTEGRATED SENSORS; MECHANICAL ISOLATION;

INTEGRATED CIRCUITS;

EID: 0025414451     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(90)87057-P     Document Type: Article

References (4)

1. A graphic representation of the piezoresistance coefficients in silicon
2. Piezo-Hall coefficients of n-type silicon
3. Piezoresistivity effects in plastic-encapsulated integrated circuits
4. Silicon as a mechanical material