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Volumn 37, Issue 3, 1990, Pages 744-754

Interface State Creation And Charge Trapping In The Medium-To-High Gate Voltage Range (V D/2 ≥ V G ≥ V D) During Hot-Carrier Stressing Of N-Mos Transistors

Author keywords

[No Author keywords available]

Indexed keywords

OXIDES; SEMICONDUCTOR DEVICES, MOS; SEMICONDUCTOR MATERIALS--CHARGE CARRIERS;

EID: 0025404777     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.47781     Document Type: Article
Times cited : (188)

References (48)
  • 1
    • 0016599030 scopus 로고
    • N-channel IGFET desing limitations due to hot-electron trapping
    • S. A. Abbas and R. C. Dockerty, “N-channel IGFET desing limitations due to hot-electron trapping,” in IEDM Tech. Dig., 1975, pp. 35-38.
    • (1975) IEDM Tech. Dig , pp. 35-38
    • Abbas, S.A.1    Dockerty, R.C.2
  • 3
    • 0017465761 scopus 로고
    • Effect of Electron Trapping in IGFET characteristics
    • T. H. Ning, CM. Osburn, and H. N. Yu, “Effect of Electron Trapping in IGFET characteristics, “J. Electron. Mater., Vol. 6, pp. 93-97, 1977.
    • (1977) J. Electron. Mater , vol.6 , pp. 93-97
    • Ning, T.H.1    Osburn, C.M.2    Yu, H.N.3
  • 4
    • 0021606653 scopus 로고
    • Degradation in n-MOS transistors after pulsed stress
    • W. Weber, C. Werner, and G. Dorda, “Degradation in n-MOS transistors after pulsed stress,” IEEE Electron Device Lett., Vol. EDL-5, pp. 518-520, 1984.
    • (1984) IEEE Electron Device Lett. , vol.EDL-5 , pp. 518-520
    • Weber, W.1    Werner, C.2    Dorda, G.3
  • 5
    • 0021378416 scopus 로고
    • Relationship between MOSFET degradation and hot-electron-induced interface-state generation
    • F.-C. Hsu and S. Tarn “Relationship between MOSFET degradation and hot-electron-induced interface-state generation,” IEEE Electron Device Lett., Vol. EDL-5, pp. 50-52, 1984.
    • (1984) IEEE Electron Device Lett. , vol.EDL-5 , pp. 50-52
    • Hsu, F.-C.1    Tarn, S.2
  • 6
    • 0020815021 scopus 로고
    • Role of hot-hole injection in hot-carrier effects and the small degraded channel region in MOSFET's
    • E. Takeda, A. Shimizu, and T. Hagiwara, “Role of hot-hole injection in hot-carrier effects and the small degraded channel region in MOSFET's,” IEEE Electron Device Lett., Vol. EDL-4, pp. 329-331, 1983.
    • (1983) IEEE Electron Device Lett. , vol.EDL-4 , pp. 329-331
    • Takeda, E.1    Shimizu, A.2    Hagiwara, T.3
  • 7
    • 0021401123 scopus 로고
    • Structure-enhanced MOSFET degradation due to hot-electron injection
    • F.-C. Hsu and H. R. Grinolds, “Structure-enhanced MOSFET degradation due to hot-electron injection,” IEEE Electron Device Lett., Vol. EDL-5. pp. 71-74. 1984.
    • (1984) IEEE Electron Device Lett. , vol.EDL-5 , pp. 71-74
    • Hsu, F.-C.1    Grinolds, H.R.2
  • 8
    • 0021427595 scopus 로고
    • Temperature dependence of hot-electron-induced degradation in MOSFET's
    • F.-C. Hsu and K.-Y. Chiu, “Temperature dependence of hot-electron-induced degradation in MOSFET's, “IEEE Electron Device Lett., Vol. EDL-5, pp. 148-150, 1984.
    • (1984) IEEE Electron Device Lett. , vol.EDL-5 , pp. 148-150
    • Hsu, F.-C.1    Chiu, K.-Y.2
  • 9
    • 0021640156 scopus 로고
    • Hot carrier effects in MOS transistors
    • T. Poorter and P. Zoestbergen, “Hot carrier effects in MOS transistors,” in IEDM Tech. Dig., 1984, pp. 100-103.
    • (1984) IEDM Tech. Dig. , pp. 100-103
    • Poorter, T.1    Zoestbergen, P.2
  • 10
    • 0021786998 scopus 로고
    • Relationship between hot-electron/holes and degradation of p-and n-channel MOSFET's
    • T. Tsuchiya and J. Frey “Relationship between hot-electron/holes and degradation of p-and n-channel MOSFET's,” IEEE Electron Device Lett., Vol. EDL-6, pp. 8-11, 1984.
    • (1984) IEEE Electron Device Lett. , vol.EDL-6 , pp. 8-11
    • Tsuchiya, T.1    Frey, J.2
  • 11
    • 0023126153 scopus 로고
    • Hot-electron-induced interface state generation in n-channel MOSFET's at 77 K
    • S. L. Von Bruns and R. L. Anderson, “Hot-electron-induced interface state generation in n-channel MOSFET's at 77 K,” IEEE Trans. Electron Devices, Vol. ED-34, pp. 75-82, 1987.
    • (1987) IEEE Trans. Electron Devices , vol.ED-34 , pp. 75-82
    • Von Bruns, S.L.1    Anderson, R.L.2
  • 12
    • 0042608225 scopus 로고
    • Hot carrier instability in IG-FET's
    • S. A. Abbas and R. C. Dockerty, “Hot carrier instability in IG-FET's,” Appl. Phys. Lett., Vol. 27, pp. 147-148, 1975.
    • (1975) Appl. Phys. Lett , vol.27 , pp. 147-148
    • Abbas, S.A.1    Dockerty, R.C.2
  • 13
    • 0017465761 scopus 로고
    • Effect of electron trapping on IGFET Characteristics
    • T. H. Ning, C. M. Osburn, and H. N. Yu, “Effect of electron trapping on IGFET Characteristics,” J. Electron. Mater., Vol. 6, pp. 65-76. 1977.
    • (1977) J. Electron. Mater , vol.6 , pp. 65-76
    • Ning, T.H.1    Osburn, C.M.2    Yu, H.N.3
  • 15
    • 0021501819 scopus 로고
    • Some aspects of hot-electron aging in MOSFET's
    • R. Radojcic, “Some aspects of hot-electron aging in MOSFET's,” IEEE Trans. Electron Devices, Vol. ED-31, pp. 1381-1386, 1984.
    • (1984) IEEE Trans. Electron Devices , vol.ED-31 , pp. 1381-1386
    • Radojcic, R.1
  • 16
    • 0022114763 scopus 로고
    • Hot-electron-induced MOSFET Degradation at low temperatures
    • J. J. Tzou, C. C. Yao, R. Chueng, and H. Chan, “Hot-electron-induced MOSFET Degradation at low temperatures,” IEEE Electron Device Lett., Vol. EDL-6, pp. 450-452, 1985.
    • (1985) IEEE Electron Device Lett. , vol.EDL-6 , pp. 450-452
    • Tzou, J.J.1    Yao, C.C.2    Chueng, R.3    Chan, H.4
  • 18
    • 0019050797 scopus 로고
    • Degradation behavior of n-Channel M.O.S.F.E.T. s Operated at 77 K
    • J. R. Davis, “Degradation behavior of n-Channel M.O.S.F.E.T. s Operated at 77 K,” Proc. Inst. Elec. Eng., pp. 183-187, 1980.
    • (1980) Proc. Inst. Elec. Eng. , pp. 183-187
    • Davis, J.R.1
  • 19
    • 0019626245 scopus 로고
    • Interface states in MOSFET's due to hot-electron injection determined by the charge pumping technique
    • D. Schmitt and G. Dorda, “Interface states in MOSFET's due to hot-electron injection determined by the charge pumping technique,” Electron. Lett., Vol. 17, pp. 761-762, 1981.
    • (1981) Electron. Lett , vol.17 , pp. 761-762
    • Schmitt, D.1    Dorda, G.2
  • 20
    • 0020155309 scopus 로고
    • Hot electrons in MOS transistors: Lateral distribution of the trapped oxide charge
    • C. Lombardi, P. Olivio, B. Ricco, E. Sangiorgi, and M. Vanzi; “Hot electrons in MOS transistors: Lateral distribution of the trapped oxide charge,” IEEE Electron Device Lett., Vol. EDL-3;, pp. 215-217. 1982.
    • (1982) IEEE Electron Device Lett. , vol.EDL-3; , pp. 215-217
    • Lombardi, C.1    Olivio, P.2    Ricco, B.3    Sangiorgi, E.4    Vanzi, M.5
  • 21
    • 0020824234 scopus 로고
    • positive ana negative charge generation by hot carriers in n-MOSFET's
    • B. Borcnert, K. K. Hotmann, ana U. Uoraa, “positive ana negative charge generation by hot carriers in n-MOSFET's,” Electron. Lett., Vol. 19, pp. 746-747, 1983.
    • (1983) Electron. Lett. , vol.19 , pp. 746-747
    • Borcnert, B.1    Hotmann, K.K.2    Uoraa, U.3
  • 23
    • 0041525452 scopus 로고
    • Simulations of aging effects in MOS transistors
    • (Bologna, Italy), Sept
    • C. Bergonzoni and B. S. Doyle, “Simulations of aging effects in MOS transistors,” in ESSDERC Conf. Proc. (Bologna, Italy), Sept. 1987, pp. 721-724.
    • (1987) ESSDERC Conf. Proc , pp. 721-724
    • Bergonzoni, C.1    Doyle, B.S.2
  • 24
    • 0023292235 scopus 로고
    • Two-dimensional modeling of locally damaged short-channel MOSFET's operating in the linear region
    • H. Haddara and S. Cristoloveanu, “Two-dimensional modeling of locally damaged short-channel MOSFET's operating in the linear region,” IEEE Trans. Electron Devices, Vol. ED-34, pp. 378-385, 1987.
    • (1987) IEEE Trans. Electron Devices , vol.ED-34 , pp. 378-385
    • Haddara, H.1    Cristoloveanu, S.2
  • 26
    • 84942217437 scopus 로고
    • Simulation of hot-carrier degraded MOSFET's
    • (Dublin, Ireland), July 11-16
    • M. G. Ancona and N. S. Saks, “Simulation of hot-carrier degraded MOSFET's,” in Proc. 6th Int. NASECODE Conf. (Dublin, Ireland), July 11-16, 1989, pp. 415-421.
    • (1989) Proc. 6th Int. NASECODE Conf. , pp. 415-421
    • Ancona, M.G.1    Saks, N.S.2
  • 27
    • 0020904903 scopus 로고
    • Device performance degradation due to hot-carrier injection at energies below the Si-SiO, barrier
    • E. Takeda, N. Suzuki, and T. Hagiwara, “Device performance degradation due to hot-carrier injection at energies below the Si-SiO, barrier,” in IEDM Tech. Dig., 1983.
    • (1983) IEDM Tech. Dig
    • Takeda, E.1    Suzuki, N.2    Hagiwara, T.3
  • 28
    • 0020125523 scopus 로고
    • Generation of Interface states by hot-hole injection in MOSFET's
    • H. Gesch, J. P. Leburton, and G. E. Dorda, “Generation of Interface states by hot-hole injection in MOSFET's,” IEEE Trans. Electron Devices, Vol. ED-29, pp. 913-918, 1982.
    • (1982) IEEE Trans. Electron Devices , vol.ED-29 , pp. 913-918
    • Gesch, H.1    Leburton, J.P.2    Dorda, G.E.3
  • 29
    • 0022028660 scopus 로고
    • Hot-electron and hole emission effects in short n-channel MOSFET's
    • K. R. Hofmann, C. Werner, W. Weber, and G. Dorda, “Hot-electron and hole emission effects in short n-channel MOSFET's,” IEEE Trans. Electron Devices, Vol. ED-32, pp. 691-699, 1985.
    • (1985) IEEE Trans. Electron Devices , vol.ED-32 , pp. 691-699
    • Hofmann, K.R.1    Werner, C.2    Weber, W.3    Dorda, G.4
  • 30
    • 0008780580 scopus 로고
    • Observation of hot-hole injection in n-MOS transistors using a modified floating-gate technique
    • N. S. Saks et al., “Observation of hot-hole injection in n-MOS transistors using a modified floating-gate technique,” IEEE Trans. Electron Devices, Vol. ED-33, pp. 1529-1534, 1986.
    • (1986) IEEE Trans. Electron Devices , vol.ED-33 , pp. 1529-1534
    • Saks, N.S.1
  • 31
    • 0022791689 scopus 로고
    • A novel floating-gate method for measurement of ultra-low hole and electron gate currents in MOS transistors
    • Y. Nissen-Cohen, “A novel floating-gate method for measurement of ultra-low hole and electron gate currents in MOS transistors,” IEEE Electron Device Lett., Vol. EDL-7, pp. 561-563, 1986.
    • (1986) IEEE Electron Device Lett. , vol.EDL-7 , pp. 561-563
    • Nissen-Cohen, Y.1
  • 32
    • 0003164115 scopus 로고
    • Two-carrier nature of interface-state generation in hole trapping and radiation damage
    • S. K. Lai, “Two-carrier nature of interface-state generation in hole trapping and radiation damage,” Appl. Phys. Lett., Vol. 39, pp. 58-60, 1981.
    • (1981) Appl. Phys. Lett , vol.39 , pp. 58-60
    • Lai, S.K.1
  • 33
    • 0023345327 scopus 로고
    • Dynamic channel hot-carrier degradation of n-MOS transistors by enhanced electron-hole injection into the oxide
    • B. S. Doyle, M. Bourcerie, J.-C. Marchetaux, and A. Boudou, “Dynamic channel hot-carrier degradation of n-MOS transistors by enhanced electron-hole injection into the oxide,” IEEE Electron Device Lett., Vol. EDL-8, pp. 237-239, 1987.
    • (1987) IEEE Electron Device Lett. , vol.EDL-8 , pp. 237-239
    • Doyle, B.S.1    Bourcerie, M.2    Marchetaux, J.-C.3    Boudou, A.4
  • 34
    • 0001526299 scopus 로고
    • Relationship between trapped holes and interface states in MOS capacitors
    • G. Hu and W. C. Johnson, “Relationship between trapped holes and interface states in MOS capacitors,” Appl. Phys. Lett., Vol. 36, pp. 590-592, 1980.
    • (1980) Appl. Phys. Lett , vol.36 , pp. 590-592
    • Hu, G.1    Johnson, W.C.2
  • 36
    • 0015207089 scopus 로고
    • Electro-chemical charging of thermal SiO2 films by injected electron currents
    • E. H. Nicollian, C. N. Berglund, P. F. Schnidt, and J. M. Andrews, “Electro-chemical charging of thermal SiO2 films by injected electron currents,” J. Appl. Phys., Vol. 42, pp. 5654-5664, 1971.
    • (1971) J. Appl. Phys , vol.42 , pp. 5654-5664
    • Nicollian, E.H.1    Berglund, C.N.2    Schnidt, P.F.3    Andrews, J.M.4
  • 37
    • 0023536908 scopus 로고
    • Common origin for electron and hole traps in MOS devices
    • M. Aslam, “Common origin for electron and hole traps in MOS devices,” IEEE Trans. Electron Devices, Vol. ED-34, pp. 2535-2539, 1987.
    • (1987) IEEE Trans. Electron Devices , vol.ED-34 , pp. 2535-2539
    • Aslam, M.1
  • 38
    • 0022956802 scopus 로고
    • Mechanism of hot carrier induced degradation in MOSFET's
    • S. Baba, A. Kita, and J. Ueda, “Mechanism of hot carrier induced degradation in MOSFET's,” in IEDM Tech. Dig., 1986, pp. 734-737.
    • (1986) IEDM Tech. Dig , pp. 734-737
    • Baba, S.1    Kita, A.2    Ueda, J.3
  • 39
    • 84942217438 scopus 로고    scopus 로고
    • Private communication
    • S. A. Lyon, Private communication.
    • Lyon, S.A.1
  • 41
    • 0021640150 scopus 로고
    • Hot carriers in small geometry CMOS
    • L. A. Akers and M. A. Holly, “Hot carriers in small geometry CMOS,” in IEDM Tech. Dig., 1984, pp. 80-83.
    • (1984) IEDM Tech. Dig , pp. 80-83
    • Akers, L.A.1    Holly, M.A.2
  • 42
    • 0021640335 scopus 로고
    • Effect of field boron dose on substrate current in narrow channel LDD MOSFET's
    • S. Sawada, Y. Matsumoto, S. Shinozaki, and O. Ozawa, Effect of field boron dose on substrate current in narrow channel LDD MOSFET's,” in IEDM Tech. Dig., 1984, pp. 778-781.
    • (1984) IEDM Tech. Dig. , pp. 778-781
    • Sawada, S.1    Matsumoto, Y.2    Shinozaki, S.3    Ozawa, O.4
  • 44
    • 0019682190 scopus 로고
    • Elimination of hot carrier gate current by the lightly doped drain-source structure
    • S. Ogura, P. J. Tsang, W. W. Walker, D.L. Critchlow, and J. F. Shepard, “Elimination of hot carrier gate current by the lightly doped drain-source structure,” in IEDM Tech. Dig., 1981, pp. 651-654.
    • (1981) IEDM Tech. Dig , pp. 651-654
    • Ogura, S.1    Tsang, P.J.2    Walker, W.W.3    Critchlow, D.L.4    Shepard, J.F.5
  • 45
    • 0020704769 scopus 로고
    • Dynamic behaviour of the buildup of fixed charge and interface states during hot-carrier injection in encapsulated MOSFET's
    • W. G. Meyer and R. B. Fair, “Dynamic behaviour of the buildup of fixed charge and interface states during hot-carrier injection in encapsulated MOSFET's,” IEEE Trans. Electron Devices, Vol. ED-30, pp. 96-103, 1983.
    • (1983) IEEE Trans. Electron Devices , vol.ED-30 , pp. 96-103
    • Meyer, W.G.1    Fair, R.B.2
  • 46
    • 0019606794 scopus 로고
    • Effect of long-term stress on IGFET degradations due to hot electron trapping
    • H. Matsumoto, K. Sawada, S. Asai, M. Hirayama, and K. Nagasawa, “Effect of long-term stress on IGFET degradations due to hot electron trapping,” IEEE Trans. Electron Devices, Vol. ED-28, pp. 923-928, 1981.
    • (1981) IEEE Trans. Electron Devices , vol.ED-28 , pp. 923-928
    • Matsumoto, H.1    Sawada, K.2    Asai, S.3    Hirayama, M.4    Nagasawa, K.5
  • 47
  • 48
    • 0020169598 scopus 로고
    • Minatunsation of Si MOSrhl sat 77 k
    • A. Kamgar, “Minaturisation of Si MOSFET's at 77K,” IEEE Trans. Electron Devices, Vol. ED-29, pp. 1226-1228, 1982.
    • (1982) IEEE Trans. Electron Devices , vol.ED-29 , pp. 1226-1228
    • Kamgar, A.1


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