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Volumn 18, Issue 1, 1990, Pages 134-141
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Feed Optimization For the Slotted Line Antenna For High-Density Plasma Production
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Author keywords
[No Author keywords available]
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Indexed keywords
ANTENNAS, SLOT--FEED SYSTEMS;
ELECTRIC FIELDS;
MAGNETIC FIELDS;
MICROWAVES;
OPTIMIZATION;
ELECTRON-CYCLOTRON RESONANCE;
MICROWAVE POWER;
PLASMAS;
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EID: 0025386514
PISSN: 00933813
EISSN: 19399375
Source Type: Journal
DOI: 10.1109/27.45516 Document Type: Article |
Times cited : (21)
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References (27)
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