Gaseous removal of phosphorus and boron from molten silicon

Nippon Kinzoku Gakkai-si

Volumn 54, Issue 2, 1990, Pages 161-167

  Suzuki, Kichiya ^a   Sakaguchi, Kouichi ^a   Nakagiri, Toshio ^a   Sano, Nobuo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BORON - REMOVAL; EVAPORATION - VACUUM APPLICATIONS; PHOSPHORUS - REMOVAL; PLASMAS - HEATING; SEMICONDUCTING SILICON - IMPURITIES;

METALLURGICAL GRADE SILICON; OXIDIZING PLASMAS; SOLAR GRADE SILICON; VACUUM EVAPORATION;

SILICON AND ALLOYS;

EID: 0025383451     PISSN: 03694186     EISSN: None     Source Type: Journal    
DOI: 10.2320/jinstmet1952.54.2_161     Document Type: Article

References (13)