Composition and Structure of Native Oxide on Silicon by High Resolution Analytical Electron Microscopy

Journal of Materials Research

Volumn 5, Issue 2, 1990, Pages 347-351

  Kim, M J ^a   Carpenter, R W ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SURFACES--SPECTROSCOPIC ANALYSIS;

NATIVE OXIDE FILMS;

SEMICONDUCTING SILICON;

EID: 0025383272     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/JMR.1990.0347     Document Type: Article

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