Micromachining for Improvement of Integrated Ultrasonic Transducer Sensitivity

IEEE Transactions on Electron Devices

Volumn 37, Issue 1, 1990, Pages 134-140

  Mo, Jian Hua ^a   Robinson, Andrew L ^a   Fitting, Dale W ^b   Terry, Fred L ^a   Carson, Paul L ^c  

^a UNIVERSITY OF MICHIGAN   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c UNIVERSITY OF MICHIGAN HEALTH SYSTEM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METAL CUTTING--MICROMACHINING;

INTEGRATED ULTRASONIC TRANSDUCERS;

ULTRASONIC TRANSDUCERS;

EID: 0025229679     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.43810     Document Type: Article

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