A Laser-Recrystallization Technique For Silicon-TFT Integrated Circuits on Quartz Substrates and Its Application to Small-Size Monolithic Active-Matrix LCD’s

IEEE Transactions on Electron Devices

Volumn 37, Issue 1, 1990, Pages 121-127

  Fujii, Eiji ^a   Senda, Kohji ^a   Emoto, Fumiaki ^a   Yamamoto, Atsuya ^a   Nakamura, Akira ^a   Uemoto, Yasuhiro ^a   Kano, Gota ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DISPLAY DEVICES--LIQUID CRYSTAL; INTEGRATED CIRCUITS, MONOLITHIC--MANUFACTURE; TRANSISTORS--THIN FILMS;

LASER-RECRYSTALLIZATION TECHNIQUE; THIN-FILM TRANSISTORS (TFTS);

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0025206744     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.43808     Document Type: Article

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