Three dimensional ICs, having four stacked active device layers

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1989, Pages 837-840

  Kunio, T ^a   Oyama, K ^a   Hayashi, Y ^a   Morimoto, M ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC CIRCUITS; LASER BEAMS; LOGIC DEVICES; POLYSTYRENES; SEMICONDUCTOR DEVICE MANUFACTURE--SILICON ON INSULATOR TECHNOLOGY;

BUFFER CIRCUITS; FOUR-LAYER-STACKED MASTER SLICE; MASTER SLICE; PROGRAMMABLE LOGIC ARRAY; SRAM; THREE DIMENSIONAL IC;

INTEGRATED CIRCUITS;

EID: 0024918789     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)