New process for thinned, back-illuminated CCD imager devices

Volumn , Issue , 1989, Pages 98-101

  Huang, C M ^a   Burke, B E ^a   Kosicki, B B ^a   Mountain, R W ^a   Daniels, P J ^a   Harrison, D C ^a   Lincoln, G A ^a   Usiak, N ^a   Kaplan, M A ^a   Forte, A R ^a  

^a MIT LINCOLN LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE SENSORS--FABRICATION;

BACK ILLUMINATION DEVICES; CCD IMAGER; CHARGE COUPLED DEVICES;

SEMICONDUCTOR DEVICES, CHARGE COUPLED;

EID: 0024914445     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)