Thermal conductivity measurements of thin-film silicon dioxide

Volumn , Issue , 1989, Pages 121-125

  Schafft, Harry A ^a   Suehle, John S ^a   Mirel, Paul G A ^a  

^a NATIONAL INSTITUTE OF STANDARDS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS--THERMAL CONDUCTIVITY; THERMAL CONDUCTIVITY--MEASUREMENTS;

IC THIN FILMS; THERMAL STRESSES; THIN FILM DIELECTRICS; THIN-FILM SILICON DIOXIDE;

FILMS;

EID: 0024914236     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)