Yttria stabilized zirconia thin film prepared by RF magnetron sputtering method

Volumn , Issue , 1989, Pages 32-35

  Onuma, Yoshiharu ^a   Yamakawa, Hiroshi ^a   Tomura, Takehiko ^a   Kunugi, Kazumasa ^a   Kamimura, Kiichi ^a  

^a SHINSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS--SUPERCONDUCTING; SEMICONDUCTING FILMS--DOPING; SPUTTERING;

MAGNETRON SPUTTERING; YTTRIA STABILIZED ZIRCONIA THIN FILM;

CERAMIC MATERIALS;

EID: 0024888850     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)