Novel stacked capacitor cell for 64 Mb DRAM

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1989, Pages 69-70

  Wakamiya, W ^a   Tanaka, Y ^a   Kimura, H ^a   Miyatake, H ^a   Satoh, S ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; DIELECTRIC MATERIALS--THIN FILMS;

64MB DRAM; STACKED CAPACITOR CELL; STORAGE CAPACITOR;

DATA STORAGE, DIGITAL;

EID: 0024888014     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)