|
|
|
Volumn , Issue , 1989, Pages 67-72
|
|
Principles for competitive semiconductor manufacturing
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
INTEGRATED CIRCUIT MANUFACTURE--PRODUCTIVITY;
SYSTEMS SCIENCE AND CYBERNETICS--CONSTRAINT THEORY;
COMPETITIVE SEMICONDUCTOR MANUFACTURING;
CONTINUOUS MEASURABLE IMPROVEMENT;
EQUIPMENT RELIABILITY;
STATISTICAL PROCESS CONTROL;
SEMICONDUCTOR DEVICE MANUFACTURE;
|
|
EID: 0024878770
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
|
Times cited : (12)
|
|
References (16)
|
