Time dependent dielectric breakdown of 210 angstrom oxides

Volumn , Issue , 1989, Pages 1-8

  Boyko, K C ^a   Gerlach, D L ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS--FAILURE; DIELECTRIC MATERIALS--THIN FILMS; OXIDES--ELECTRIC BREAKDOWN; SEMICONDUCTOR DEVICES, MOS--FAILURE; THERMAL EFFECTS;

ACCELERATION PARAMETER; ACTIVATION ENERGY; CMOS CAPACITORS; ELECTRIC FIELD STRESS; TIME DEPENDENT DIELECTRIC BREAKDOWN;

SILICA;

EID: 0024867041     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)