SCOPUS 정보 검색 플랫폼

Volumn 20, Issue 1-2, 1989, Pages 135-141

Mechanical property measurements of thin films using load-deflection of composite rectangular membranes

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MATERIALS; MEMBRANES--MEASUREMENTS; SEMICONDUCTING SILICON--THIN FILMS; SILICON NITRIDE--THIN FILMS; STRESSES;

INTERNAL STRESS; LOAD DEFLECTION TECHNIQUES; MICROMECHANICAL DEVICES; POLYSILICON; YOUNG'S MODULUS;

FILMS;

EID: 0024771422 PISSN: 02506874 EISSN: None Source Type: Journal
DOI: 10.1016/0250-6874(89)87111-2 Document Type: Article

Times cited : (344)

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7
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8
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15
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.