Modeling of Stress Effects in Silicon Oxidation

IEEE Transactions on Electron Devices

Volumn 36, Issue 11, 1989, Pages 2415-2421

  Sutardja, Pantas ^a   Oldham, William G ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR DEVICES--MODELING; SEMICONDUCTOR MATERIALS--STRESSES;

MECHANICAL FACTORS; OXIDE VISCOSITY; SILICON OXIDATION; STRESS EFFECTS;

SEMICONDUCTING SILICON;

EID: 0024769421     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.43661     Document Type: Article

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