메뉴 건너뛰기




Volumn 36, Issue 10, 1989, Pages 2043-2064

Heterojunction Bipolar Transistors Using Si-Ge Alloys

Author keywords

[No Author keywords available]

Indexed keywords

MOLECULAR BEAM EPITAXY; SILICON GERMANIUM ALLOYS;

EID: 0024752976     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.40887     Document Type: Article
Times cited : (335)

References (121)
  • 1
    • 36049057825 scopus 로고
    • Influence of uniaxial stress on the indirect absorption edge in silicon and germanium
    • Mar.
    • J. Baslev, “Influence of uniaxial stress on the indirect absorption edge in silicon and germanium,” Phys. Rev., vol. 143, pp. 636–647, 647, Mar. 1966.
    • (1966) Phys. Rev , vol.143 , pp. 636-647
    • Baslev, J.1
  • 2
    • 36149024990 scopus 로고
    • Intrinsic optical absorption in germanium-silicon alloys
    • Mar.
    • R. Braunstein, A. R. Moore, and F. Herman, “Intrinsic optical absorption in germanium-silicon alloys,” Phys. Rev., vol. 109, pp. 695–710, Mar. 1958.
    • (1958) Phys.Rev , vol.109 , pp. 695-710
    • Braunstein, R.1    Moore, A.R.2    Herman, F.3
  • 3
    • 0013458637 scopus 로고
    • Indirect band gap of coherently strained Si1-xGex bulk alloys on < 001 > silicon substrates
    • Feb.
    • R. People, “Indirect band gap of coherently strained Si 1-x Ge x bulk alloys on < 001 > silicon substrates,” Phys. Rev. B, vol. 32, pp. 1405–1408, Feb. 1985.
    • (1985) Phys. Rev.B , vol.32 , pp. 1405-1408
    • People, R.1
  • 4
    • 0022664894 scopus 로고
    • Band alignments of coherently strained Ge xSi 1-xheterostructures on < 001 > substrates
    • R. People and J. C. Bean, “Band alignments of coherently strained Ge x Si 1-x heterostructures on < 001 > substrates,” Appl. Phys. Lett., vol. 48, pp. 538–540, 1986.
    • (1986) Appl. Phys. Lett , vol.48 , pp. 538-540
    • People, R.1    Bean, J.C.2
  • 5
    • 0001888922 scopus 로고
    • Measurement of the bandgap of Ge xSi 1-x/Si strained-layer heterostructures
    • Dec.
    • D. V. Lang, R. People, J. C. Bean, and A. M. Sergent, “Measurement of the bandgap of Ge x Si1-x/Si strained-layer heterostructures,” Appl. Phys. Lett., vol. 47, pp. 1333–1335, Dec. 1985.
    • (1985) Appl. Phys. Lett , vol.47 , pp. 1333-1335
    • Lang, D.V.1    People, R.2    Bean, J.C.3    Sergent, A.M.4
  • 6
    • 0000920065 scopus 로고
    • Theoretical calculations of semiconductor heterojunction discontinuities
    • C. G. Van de Walle and R. M. Martin, “Theoretical calculations of semiconductor heterojunction discontinuities,” J. Vac. Sci. Technol., nol., vol. B4, pp. 1055–1059, 1986.
    • (1986) J. Vac. Sci. Technol., nol , vol.B4 , pp. 1055-1059
    • Van de Walle, C.G.1    Martin, R.M.2
  • 7
    • 5244368923 scopus 로고
    • Electric subbands in Si/SiGe strained layer superlattices d
    • C. Zeller and G. Abstreiter, “Electric subbands in Si/SiGe strained layer superlattices d,” Z. Phys. B, vol. 64, pp. 137–143, 1986.
    • (1986) Z. Phys. B , vol.64 , pp. 137-143
    • Zeller, C.1    Abstreiter, G.2
  • 8
    • 33144456500 scopus 로고
    • Strain-induced two-dimensional electron gas in selectively Si/SixGe1-x, superlattices
    • G. Abstreiter, H. Brugger, T. Wolff, H. Jorke, and H.-J. Herzog, “Strain-induced two-dimensional electron gas in selectively Si/Si x Ge1-x, superlattices,” Phys. Rev. Lett., vol. 54, no. 22, pp. 2441–2443, 1985.
    • (1985) Phys. Rev. Lett , vol.54 , Issue.22 , pp. 2441-2443
    • Abstreiter, G.1    Brugger, H.2    Wolff, T.3    Jorke, H.4    Herzog, H.-J.5
  • 9
    • 0042286122 scopus 로고
    • Indirect band gap and band alignment for coherently strained Si 1-xGe x on germanium (100)
    • Feb.
    • R. People, “Indirect band gap and band alignment for coherently strained Si 1-xGe x on germanium (100),” Phys. Rev. B., vol. 34, pp. 2508–2510, Feb. 1986.
    • (1986) Phys. Rev. B , vol.34 , pp. 2508-2510
    • People, R.1
  • 10
    • 0022720216 scopus 로고
    • Enhancement- and depletion-mode p-channel Ge xSi 1-x modulation-doped FET’s
    • May
    • T. P. Pearsall and J. C. Bean, “Enhancement- and depletion-mode p-channel Ge x Si1-x modulation-doped FET’s,” IEEE Electron Device Lett., vol. EDL-7, no. 5, pp. 308–310, May 1986.
    • (1986) IEEE Electron Device Lett , vol.EDL-7 , Issue.5 , pp. 308-310
    • Pearsall, T.P.1    Bean, J.C.2
  • 12
    • 36549095453 scopus 로고
    • Resonant tunnelling diode in the Si 1-xGe x System
    • H. C. Liu, D. Landheer, M. Buchanan, and D. C. Houghton, “Resonant tunnelling diode in the Si 1-xGe x System,” Appl. Phys. Lett., vol. 52, pp. 1809–1811, 1988.
    • (1988) Appl. Phys. Lett , vol.52 , pp. 1809-1811
    • Liu, H.C.1    Landheer, D.2    Buchanan, M.3    Houghton, D.C.4
  • 13
    • 0001530931 scopus 로고
    • Resonant tunneling through a Si/Ge x Si 1-x/Si heterostructure on a GeSi buffer layer
    • S. S. Rhee, J. S. Park, R. P. G. Karunasiri, Q. Ye, and K. L. Wang, “Resonant tunneling through a Si/Ge x Si1-x/Si heterostructure on a GeSi buffer layer,” Appl. Phys. Lett., vo l. 53, pp. 204–206, 1988.
    • (1988) Appl. Phys. Lett , vol.53 , pp. 204-206
    • Rhee, S.S.1    Park, J.S.2    Karunasiri, R.P.G.3    Ye, Q.4    Wang, K.L.5
  • 15
    • 0022667117 scopus 로고
    • Waveguide infrared photodetectors on a silicon chip
    • Feb.
    • S. Luryi, T. D. Pearsall, H. Temkin, and J. C. Bean, “Waveguide infrared photodetectors on a silicon chip,” IEEE Electron Device Lett., vol. EDL-7, pp. 104–106, Feb. 1986.
    • (1986) IEEE Electron Device Lett , vol.EDL-7 , pp. 104-106
    • Luryi, S.1    Pearsall, T.D.2    Temkin, H.3    Bean, J.C.4
  • 16
    • 36549097538 scopus 로고
    • GexSi1-xstrained-layer superlattice waveguide photodetectors operating at near 1.3μm
    • H. Temkin, T. P. Pearsall, J. C. Bean, R. A. Logan, and S. Luryi, “GexSi 1-x strained-layer superlattice waveguide photodetectors operating at near 1.3 μ m,” Appl. Phys. Lett., vol. 48, no. 15, pp. 963–965, 965, 1986.
    • (1986) Appl.Phys. Lett , vol.48 , Issue.15 , pp. 963-965
    • Temkin, H.1    Pearsall, T.P.2    Bean, J.C.3    Logan, R.A.4    Luryi, S.5
  • 17
    • 0022717910 scopus 로고
    • Avalanche gain in Ge xSi 1-x infrared waveguide detectors
    • May
    • T. P. Pearsall, H. Temkin, J. C. Bean, and S. Luryi, “Avalanche gain in Ge x Si 1-x infrared waveguide detectors,” IEEE Electron Device Lett., vol. EDL-7, pp. 330–332, May 1986.
    • (1986) IEEE Electron Device Lett , vol.EDL-7 , pp. 330-332
    • Pearsall, T.P.1    Temkin, H.2    Bean, J.C.3    Luryi, S.4
  • 18
    • 36549101784 scopus 로고
    • Ge 0.6Si 0.4 rib waveguide avalanche photodetectors for 1.3μm operation
    • Sept.
    • H. Temkin, A. Antreasyan, N. A. Olsson, T. P. Pearsall, and J. C. Bean, “Ge 0.6 Si 0.4 rib waveguide avalanche photodetectors for 1.3 μ m operation,” Appl. Phys. Lett., vol. 49, no. 13, pp. 809–811, Sept. 1986.
    • (1986) Appl. Phys. Lett , vol.49 , Issue.13 , pp. 809-811
    • Temkin, H.1    Antreasyan, A.2    Olsson, N.A.3    Pearsall, T.P.4    Bean, J.C.5
  • 24
    • 0016569440 scopus 로고
    • A one dimensional SiGe superlattice grown by UHV epitaxy
    • E. Kasper, H. J. Herzog, and H. Kibbel, “A one dimensional SiGe superlattice grown by UHV epitaxy,” Appl. Phys., vol. 8, pp. 199–205, 205, 1975.
    • (1975) Appl. Phys , vol.8 , pp. 199-205
    • Kasper, E.1    Herzog, H.J.2    Kibbel, H.3
  • 25
    • 0020782494 scopus 로고
    • The properties of Si/Si 1-xGe x, films grown on Si substrates by chemical vapor deposition
    • H. M. Manasavit, I. S. Gergis, and A. B. Jones, “The properties of Si/Si 1-xGe x, films grown on Si substrates by chemical vapor deposition,” J. Electron. Materials, vol. 12, no. 4, pp. 637–651, 1982.
    • (1982) J. Electron. Materials , vol.12 , Issue.4 , pp. 637-651
    • Manasavit, H.M.1    Gergis, I.S.2    Jones, A.B.3
  • 26
    • 84956263829 scopus 로고
    • Ge xSi 1-x/Si strained-layer superlattice grown by molecular beam epitaxy
    • J. C. Bean, L. C. Feldman, A. T. Fiory, S. Nakahara, and I. K. Robinson, “Ge x Si 1-x/Si strained-layer superlattice grown by molecular beam epitaxy,” J. Vac. Sci. Technol., vo l. A2, no. 2, pp. 436–440, 1984.
    • (1984) J. Vac. Sci. Technol , vol.A2 , Issue.2 , pp. 436-440
    • Bean, J.C.1    Feldman, L.C.2    Fiory, A.T.3    Nakahara, S.4    Robinson, I.K.5
  • 27
    • 0342709009 scopus 로고
    • Crystal interfaces. Part I. Semi-infinite crystals
    • J. H. van der Merwe, “Crystal interfaces. Part I. Semi-infinite crystals,” J. Appl. Phys., vol. 34, no. 1, pp. 117–122, 1963.
    • (1963) J. Appl. Phys , vol.34 , Issue.1 , pp. 117-122
    • van der Merwe, J.H.1
  • 28
    • 0346955939 scopus 로고
    • Defects in epitaxial multi-layers layers I. Misfit dislocations in layers
    • J. M. Matthews and A. E. Blakeslee, “Defects in epitaxial multi-layers layers I. Misfit dislocations in layers,” J. Crystal Growth, vol. 27, pp, 118–125, 1974.
    • (1974) J. Crystal Growth , vol.27 , pp. 118-125
    • Matthews, J.M.1    Blakeslee, A.E.2
  • 29
    • 84930092699 scopus 로고    scopus 로고
    • Defects in epitaxial multilayers II. Dislocation pileups, threading dislocations, slip lines and cracks
    • J. M. Matthews and A. E. Blakeslee, Defects in epitaxial multilayers II. Dislocation pile-ups, threading dislocations, slip lines and cracks,” J. Crystal Growth, vo l. 32, pp. 265–273, 1975.
    • , vol.32 , pp. 265-273
    • Matthews, J.M.1    Blakeslee, A.E.2
  • 31
    • 21544464728 scopus 로고
    • Calculation of critical layer thickness versus lattice m mismatch for Ge x Si 1-x/Si strained layer heterostructures
    • R. People and J. C. Bean, “Calculation of critical layer thickness versus lattice m mismatch for Ge x Si 1-x/Si strained layer heterostructures,” structures,” Appl. Phys. Lett., vol. 47, no. 3, pp. 322–324, 1985.
    • (1985) structures, ” Appl. Phys. Lett , vol.47 , Issue.3 , pp. 322-324
    • People, R.1    Bean, J.C.2
  • 32
    • 36549093303 scopus 로고
    • Relaxation of strained layer semiconductor structures via plastic flow
    • B.W.Dodson and J. Y. Tsao, “Relaxation of strained layer semiconductor structures via plastic flow,” Appl. Phys. Lett., vol. 51, no. 17, pp. 1325–1327, 1987.
    • (1987) Appl. Phys. Lett , vol.51 , Issue.17 , pp. 1325-1327
    • Dodson, B.W.1    Tsao, J.Y.2
  • 33
    • 84950752876 scopus 로고
    • Characterization of epitaxial films by grazing-incidence x-ray diffraction
    • A. Segmuller, “Characterization of epitaxial films by grazing-incidence x-ray diffraction,” Mat. Res. Soc. Symp. Proc., vol. 77, pp. 151–157, 1987.
    • (1987) Mat. Res. Soc. Symp. Proc , vol.77 , pp. 151-157
    • Segmuller, A.1
  • 34
    • 0021850370 scopus 로고
    • Structure imaging of commensurate Ge x Si 1-x/Si (100) interfaces and superlattices
    • R. Hull, J. M. Gibson, and J. C. Bean, “Structure imaging of commensurate Ge xSi1-x/Si (100) interfaces and superlattices,” Appl. Phys. Lett., vol. 46, pp. 179–181, 1985.
    • (1985) Appl. Phys. Lett , vol.46 , pp. 179-181
    • Hull, R.1    Gibson, J.M.2    Bean, J.C.3
  • 35
    • 0000026038 scopus 로고
    • Raman scattering from Ge x Si 1-x/Si strained-layer superlattices
    • F. Cedeira, A. Pinczuk, J. C. Bean, B. Batlogg, and B. A. Wilson, “Raman scattering from GexSi1-x/Si strained-layer superlattices,” Appl. Phys. Lett., vol. 45, pp. 1138–1140, 1984.
    • (1984) Appl. Phys. Lett , vol.45 , pp. 1138-1140
    • Cedeira, F.1    Pinczuk, A.2    Bean, J.C.3    Batlogg, B.4    Wilson, B.A.5
  • 36
    • 0001368307 scopus 로고
    • Determination of critical layer thickness of Si 1-xGe x/Si heterostructures by direct observation of misfit dislocations
    • Y. Kohama, Y. Fukuda, and M. Seki, “Determination of critical layer thickness of Si 1-xGex/Si heterostructures by direct observation of misfit dislocations,” Appl. Phys. Lett., vol. 52, pp. 380–382, 382, 1988.
    • (1988) Appl. Phys. Lett , vol.52 , pp. 380-382
    • Kohama, Y.1    Fukuda, Y.2    Seki, M.3
  • 37
    • 0005326536 scopus 로고
    • Thermal relaxation of metastable strained-layer Ge x Si 1-x/Si epitaxy
    • A. T. Fiory, J. C. Bean, R. Hull, and S. Nakahara, “Thermal relaxation of metastable strained-layer Ge x Si 1-x/Si epitaxy,” Phys. Rev. B, vol. 31, pp. 4063–4065, 1985.
    • (1985) Phys. Rev. B , vol.31 , pp. 4063-4065
    • Fiory, A.T.1    Bean, J.C.2    Hull, R.3    Nakahara, S.4
  • 38
  • 39
    • 0346340325 scopus 로고
    • Electronic structure of Ge-Si monolayer strained-layer superlattices
    • T. P. Pearsall et al., “Electronic structure of Ge-Si monolayer strained-layer superlattices,” Phys. Rev. B., 1989.
    • (1989) Phys. Rev. B.
    • Pearsall, T.P.1
  • 40
    • 84939389577 scopus 로고
    • Band structure and optical properties of strain symmetrized short period Si/Ge superlattices on Si(100) substrates
    • R. Zachai, E. Freiss, G. Abstreiter, E. Kasper, and H. Kibbel, “Band structure and optical properties of strain symmetrized short period Si/Ge superlattices on Si(100) substrates,” Phys, Rev. Lett., 1989.
    • (1989) Phys, Rev. Lett
    • Zachai, R.1    Freiss, E.2    Abstreiter, G.3    Kasper, E.4    Kibbel, H.5
  • 42
    • 0019607487 scopus 로고
    • Sharp profiles with high and low doping levels in silicon grown by molecular beam epitaxy itaxy
    • S. S. lyer, R. A. Metzger, and F. G. Allen, “Sharp profiles with high and low doping levels in silicon grown by molecular beam epitaxy itaxy,” J. Appl. Phys., vol. 52, pp. 5608–5612, 1981.
    • (1981) J. Appl. Phys , vol.52 , pp. 5608-5612
    • lyer, S.S.1    Metzger, R.A.2    Allen, F.G.3
  • 43
    • 0005942941 scopus 로고
    • Doping in secondary implantation
    • H. Jorke, H. J. Herzog, and H. Kibbel, “Doping in secondary implantation,” Appl. Phys. Lett., vol. 47, pp. 511–513, 1985.
    • (1985) Appl. Phys. Lett , vol.47 , pp. 511-513
    • Jorke, H.1    Herzog, H.J.2    Kibbel, H.3
  • 47
    • 0022561177 scopus 로고
    • Boron doping in Si molecular beam epitaxy by coevaporation of B2O3 or doped silicon
    • R. Ostrom and F. G. Allen, “Boron doping in Si molecular beam epitaxy by coevaporation of B 2 O 3 or doped silicon,” Appl. Phys. Lett., vol. 48, no. 3, pp. 221–223, 1986.
    • (1986) Appl. Phys. Lett , vol.48 , Issue.3 , pp. 221-223
    • Ostrom, R.1    Allen, F.G.2
  • 48
    • 0041537527 scopus 로고
    • Boron oxide interaction with silicon in silicon molecular beam epitaxy
    • E. de Fresart, S. S. Rhee, and K. L. Wang, “Boron oxide interaction with silicon in silicon molecular beam epitaxy,” Appl. Phys. Lett., vol. 49, no. 14, pp. 847–849, 1986.
    • (1986) Appl. Phys. Lett , vol.49 , Issue.14 , pp. 847-849
    • de Fresart, E.1    Rhee, S.S.2    Wang, K.L.3
  • 49
    • 0021421890 scopus 로고
    • p-type doping in Si molecular beam epitaxy by coevaporation of boron
    • R. A. A. Kubiak, W. Y. Leong, and E. H. C. Parker, “p-type doping in Si molecular beam epitaxy by coevaporation of boron,” Appl. Phys. Lett., vo l. 44, no. 9, pp. 878–880, 1984.
    • (1984) Appl. Phys. Lett , vol.44 , Issue.9 , pp. 878-880
    • Kubiak, R.A.A.1    Leong, W.Y.2    Parker, E.H.C.3
  • 50
    • 0041710737 scopus 로고
    • Boron heavy doping for Si molecular beam epitaxy using a HBO2source
    • T. Tatsumi, H. Hirayama, and N. Aizaki, “Boron heavy doping for Si molecular beam epitaxy using a HBO 2 source,” Appl. Phys. Lett., vol. 50, no. 18, pp. 1234–1236, 1987.
    • (1987) Appl. Phys. Lett , vol.50 , Issue.18 , pp. 1234-1236
    • Tatsumi, T.1    Hirayama, H.2    Aizaki, N.3
  • 51
    • 0018978804 scopus 로고
    • Silicon molecular beam epitaxy with simultaneous ion implant doping
    • Y. Ota, “Silicon molecular beam epitaxy with simultaneous ion implant doping,” J. Appl. Phys., vol. 51, no. 2, pp. 1102–1110, 1980.
    • (1980) J. Appl. Phys , vol.51 , Issue.2 , pp. 1102-1110
    • Ota, Y.1
  • 52
    • 0020091389 scopus 로고
    • Si MBE apparatus for uniform high rate deposition on standard format wafers
    • J. C. Bean and E. A. Sadowski, “Si MBE apparatus for uniform high rate deposition on standard format wafers,” J. Vac. Sci. Technol., vol. 20, no. 2, pp. 137–142, 1982.
    • (1982) J. Vac. Sci. Technol , vol.20 , Issue.2 , pp. 137-142
    • Bean, J.C.1    Sadowski, E.A.2
  • 54
    • 5844399719 scopus 로고
    • Low-temperature silicon epitaxy by ultrahigh vacuum chemical vapor deposition
    • B. S. Meyerson, “Low-temperature silicon epitaxy by ultrahigh vacuum chemical vapor deposition,” Appl. Phys. Lett., vol. 48, no. 12, pp. 797–799, 1986.
    • (1986) Appl. Phys. Lett , vol.48 , Issue.12 , pp. 797-799
    • Meyerson, B.S.1
  • 55
    • 36549093561 scopus 로고
    • Non-equlibrium boron doping effects in low temperature expitaxial silicon films
    • B. S. Meyerson, F. K. Legoues, T. N. Nguyen, and D. H. Harame, “Non-equlibrium boron doping effects in low temperature expitaxial silicon films,” Appl. Phys. Lett., vol. 50, no. 2, pp. 113–115, 1987.
    • (1987) Appl. Phys. Lett , vol.50 , Issue.2 , pp. 113-115
    • Meyerson, B.S.1    Legoues, F.K.2    Nguyen, T.N.3    Harame, D.H.4
  • 56
    • 36549092192 scopus 로고
    • Cooperative phenomena in silicon/germanium low temperature epitaxy
    • B. S. Meyerson, K. J. Uram, and F. K. Legoues, “Cooperative phenomena in silicon/germanium low temperature epitaxy,” Appl. Phys. Lett., vol. 53, no. 25, pp. 2555–2557, 1988.
    • (1988) Appl. Phys. Lett , vol.53 , Issue.25 , pp. 2555-2557
    • Meyerson, B.S.1    Uram, K.J.2    Legoues, F.K.3
  • 57
    • 30244452690 scopus 로고
    • Limited reaction processing: silicon epitaxy
    • J. F. Gibbons, C. M. Gronet, and K. E. Williams, “Limited reaction processing: silicon epitaxy,” Appl. Phys. Lett., vol. 47, pp. 721–723, 1985.
    • (1985) Appl. Phys. Lett , vol.47 , pp. 721-723
    • Gibbons, J.F.1    Gronet, C.M.2    Williams, K.E.3
  • 58
    • 84914352553 scopus 로고
    • Limited reaction processing: Growth of multiple layers of epitaxial Si and Si1-xGex
    • C. M. Gronet et al., “Limited reaction processing: Growth of multiple layers of epitaxial Si and Si1-xGex ” in Electrochem. Soc. Extended Abstracts, vol. 88–1, 1988, p. 286.
    • (1988) Electrochem. Soc. Extended Abstracts , vol.88 , pp. 286
    • Gronet, C.M.1
  • 59
    • 0020704346 scopus 로고
    • Short time annealing
    • T. O. Sedgwick, “Short time annealing,” J. Electrochem. Soc., vol. 130, no. 2, pp. 484–493, 1983.
    • (1983) J. Electrochem. Soc , vol.130 , Issue.2 , pp. 484-493
    • Sedgwick, T.O.1
  • 60
    • 0347711191 scopus 로고
    • Thermal relaxation of SiGe layers misfit dislocation generation versus diffusion
    • F. K. LeGoues, S. S. Iyer, K. N. Tu, and S. L. Delage, “Thermal relaxation of SiGe layers misfit dislocation generation versus diffusion,” in Mat. Res. Soc. Symp. Proc., vol. 103, 1987, pp. 185–190. 190.
    • (1987) Mat. Res. Soc. Symp. Proc , vol.103 , pp. 185-190
    • LeGoues, F.K.1    Iyer, S.S.2    Tu, K.N.3    Delage, S.L.4
  • 61
    • 0038988656 scopus 로고
    • Propogation of dislocations through SiGe/Si strained layers and superlattices
    • R. Hull, J. C. Bean, and R. E. Leibenguth, “Propogation of dislocations through SiGe/Si strained layers and superlattices,” Mat. Res. Soc. Symp. Proc., vol. 116, 1988, pp. 505–512.
    • (1988) Mat. Res. Soc. Symp. Proc , vol.116 , pp. 505-512
    • Hull, R.1    Bean, J.C.2    Leibenguth, R.E.3
  • 62
    • 2842542186 scopus 로고
    • n-Si/p-Si1-xGex/n-Si double-heterojunction bipolar transistors
    • June
    • D.-X. Xu, G.-D. Shen, M. Willander, W.-X. Ni, and G. V. Hansson, son, “n-Si/p-Si1-xGex/n-Si double-heterojunction bipolar transistors,” Appl. Phys. Lett., vol. 52, pp. 2239–2241, June 1988.
    • (1988) Appl. Phys. Lett , vol.52 , pp. 2239-2241
    • Xu, D.-X.1    Shen, G.-D.2    Willander, M.3    Ni, W.-X.4    Hanssonson, G.V.5
  • 63
    • 36549101577 scopus 로고
    • Si/Ge0.3Si0.7/Si heterojunction bipolar transistor made with Si molecular beam epitaxy
    • Mar.
    • T. Tatsumi, H. Hirayama, and N. Aizaki, “Si/Ge 0.3 Si 0.7/Si heterojunction bipolar transistor made with Si molecular beam epitaxy, Appl. Phys. Lett., vol. 52, pp. 895–897, Mar. 1988.
    • (1988) Appl. Phys. Lett , vol.52 , pp. 895-897
    • Tatsumi, T.1    Hirayama, H.2    Aizaki, N.3
  • 67
    • 36549101680 scopus 로고
    • Novel oxidation processes in Ge implanted Si and its effect on oxidation kinetics
    • O. W. Holland, C. W. White, and D. Fathy, “Novel oxidation processes in Ge implanted Si and its effect on oxidation kinetics,” Appl. Phys. Lett., vol. 51, 520, 1987.
    • (1987) Appl. Phys. Lett , vol.51 , Issue.520
    • Holland, O.W.1    White, C.W.2    Fathy, D.3
  • 69
    • 84864384696 scopus 로고
    • Physics and applications of GexSi1-x/Si strained-layer heterostructures
    • Sept.
    • R. People, “Physics and applications of Ge x Si 1-x/Si strained-layer heterostructures,” IEEE J. Quantum Electron., vol. QE-22, pp. 1696–1710, Sept. 1986.
    • (1986) IEEE J. Quantum Electron , vol.QE-22 , pp. 1696-1710
    • People, R.1
  • 71
    • 84939353934 scopus 로고
    • The device application of silicon molecular beam epitaxy
    • J. C. Bean, “The device application of silicon molecular beam epitaxy,” Inst. Phys. Conf. Ser., vol. 82, pp. 11–18, 1987.
    • (1987) Inst. Phys. Conf. Ser , vol.82 , pp. 11-18
    • Bean, J.C.1
  • 72
    • 0019918412 scopus 로고
    • Heterostructure bipolar transistors and integrated circuits
    • Jan.
    • H. Kroemer, “Heterostructure bipolar transistors and integrated circuits,” Proc. IEEE, vol. 70, pp. 13–25, Jan. 1982.
    • (1982) Proc. IEEE , vol.70 , pp. 13-25
    • Kroemer, H.1
  • 73
    • 0024169419 scopus 로고
    • Bipolar transistor scaling for minimum switching delay and energy dissipation
    • J. M. C. Stork et al., “Bipolar transistor scaling for minimum switching delay and energy dissipation,” in IEDM Tech. Dig., 1988, pp. 550–553.
    • (1988) IEDM Tech. Dig , pp. 550-553
    • Stork, J.M.C.1
  • 74
    • 0019569281 scopus 로고
    • The effect of base doping on the performance of Si bipolar transistors at low temperature
    • May
    • W. P. Dumke, “The effect of base doping on the performance of Si bipolar transistors at low temperature,” IEEE Trans. Electron. Devices, vol. ED-28, pp. 494–500, May 1981.
    • (1981) IEEE Trans. Electron. Devices , vol.ED-28 , pp. 494-500
    • Dumke, W.P.1
  • 75
    • 0023548197 scopus 로고
    • High performance operation of silicon bipolar transistors at liquid nitrogen operation
    • J. M. C. Stork, D. L. Harame, B. S. Meyerson, and T. N. Nguyen, “High performance operation of silicon bipolar transistors at liquid nitrogen operation,” in IEDM Tech. Dig., 1987, pp. 405–408.
    • (1987) IEDM Tech. Dig , pp. 405-408
    • Stork, J.M.C.1    Harame, D.L.2    Meyerson, B.S.3    Nguyen, T.N.4
  • 76
    • 0023541358 scopus 로고
    • Optimization of bipolar transistors for low temperature operation
    • J. C. S. Woo and J. D. Plummer, “Optimization of bipolar transistors for low temperature operation,” in IEDM Tech. Dig., 1987, PP. 401–404.
    • (1987) IEDM Tech. Dig , pp. 401-404
    • Woo, J.C.S.1    Plummer, J.D.2
  • 77
    • 0021406527 scopus 로고    scopus 로고
    • Molecular beam epitaxial growth of GaP on Si
    • S. L. Wright, H. Kroemer, and M. Inada, “Molecular beam epitaxgrowth of GaP on Si.J.Appl, Phys., Vol 55.pp.2916-2917
    • J.Appl, Phys. , vol.55 , pp. 2916-2927
    • Wright, S.L.1    Kroemer, H.2    Inada, M.3
  • 78
    • 0022813390 scopus 로고
    • N-type SIPOS and polysilicon emitters
    • Nov.
    • Y. H. Kwark and R. M. Swanson, “N-type SIPOS and poly-silicon emitters,” Solid-state Electron., vol. 30, pp. 1121-1 125, Nov.1987.
    • (1987) Solid-state Electron. , vol.30 , pp. 1121-1125
    • Kwark, Y.H.1    Swanson, R.M.2
  • 80
    • 0022151726 scopus 로고
    • A studyof n+-SIPOS : p-Si heterojunction emitters
    • Nov
    • E. Yablonovitch and T. Gmitter, “A study of n+-SIPOS : p-Si heterojunctionemitters, IEEE Electron Device Lett., vol. EDL-6, pp.597-599, Nov. 1985
    • (1985) IEEE Electron Device Lett. , vol.EDL-6 , pp. 597-599
    • Yablonovitch, E.1    Gmitter, T.2
  • 81
    • 84914334175 scopus 로고
    • IV characteristics of oxygendoped Si epitaxial film (OXSEF)/Si heterojunctions
    • Oct
    • M. Takahashi, M. Tabe, and Y. Sakakibara, IV characteristics of oxygendoped Si epitaxial film (OXSEF)/Si heterojunctions, IEEE Electron Device Lett., vol. EDL-8, pp. 475-476, Oct. 1987.
    • (1987) IEEE Electron Device Lett. , vol.EDL-8 , pp. 475-476
    • Takahashi, M.1    Tabe, M.2    Sakakibara, Y.3
  • 82
    • 0023965314 scopus 로고
    • ΒP-SiC/Si heterojunction bipolar transistors with high current gain
    • Feb
    • T. Sugii et al., “ΒP-SiC/Si heterojunction bipolar transistors with high current gain,” IEEE Electron Device Lett., vol. 9, pp. 87-89, Feb. 1988.
    • (1988) IEEE Electron Device Lett. , vol.9 , pp. 87-89
    • Sugii, T.1
  • 83
    • 0023604281 scopus 로고
    • Micro-crystalline heteroemitter with high efficiency for Si HBT
    • K. Sasaki, T. Fukazawa, and S. Furukawa, “Micro-crystalline heteroemitter with high efficiency for Si HBT” in IEDM Tech. Dig., 1987, pp. 186-189.
    • (1987) IEDM Tech. Dig. , pp. 186-189
    • Sasaki, K.1    Fukazawa, T.2    Furukawa, S.3
  • 84
    • 0022813439 scopus 로고
    • Silicon heterojunction bipolar transistors with amorphous and microcrystalline emitters
    • Nov
    • J. Symons, M. Ghannam, A. Neugroschel, J. Nijs, and R. Mertens, “Silicon heterojunction bipolar transistors with amorphous and microcrystalline emitters,” Solid-State Electron., vol. 30, pp. 1143-1145, Nov. 1987.
    • (1987) Solid-State Electron. , vol.30 , pp. 1143-1145
    • Symons, J.1    Ghannam, M.2    Neugroschel, A.3    Nijs, J.4    Mertens, R.5
  • 86
    • 0024481174 scopus 로고
    • High speed performance of Si/Si1-x GexGelheterojunction bipolar transistors
    • T. Won and H. Morkoc, “High speed performance of Si/Si1-xGexGelheterojunction bipolar transistors,” IEEE EIectron Device Left., vol.10, 110. 1, pp. 33-35, 1989.
    • (1989) IEEE EIectron Device Left. , vol.10 , Issue.1 , pp. 33-35
    • Won, T.1    Morkoc, H.2
  • 87
    • 0023982253 scopus 로고
    • A new effect at high currents in heterostructure bipolar transistors
    • Sept
    • S. Tiwari, “A new effect at high currents in heterostructure bipolar transistors,” IEEE Electron Device Lett., vol. 9, pp. 142-144, Sept.1988.
    • (1988) IEEE Electron Device Lett. , vol.9 , pp. 142-144
    • Tiwari, S.1
  • 88
    • 0001242402 scopus 로고
    • An investigation of the effect of graded layers and tunneling on the performance of AlGaAs/GaAs heterojunction bipolar transistors
    • Dec
    • A. A. Grinberg, M. S. Shur, R. J. Fischer, and H. Morkoq, “An investigation of the effect of graded layers and tunneling on the performance of AlGaAs/GaAs heterojunction bipolar transistors,” IEEE Trans. Electron Devices, vol. ED-31, pp. 1758-1765, Dec.1984.
    • (1984) IEEE Trans. Electron Devices , vol.ED-31 , pp. 1758-1765
    • Grinberg, A.A.1    Shur, M.S.2    Fischer, R.J.3    Morkoq, H.4
  • 89
    • 0023982783 scopus 로고
    • Effect of compositionally grading on DC characteristics of AlGaAs heterojunction bipolar transistors
    • Part 2 Mar
    • C. Takano, K. Taira, H. Kawai, and M. Arai, “Effect of compositionally grading on DC characteristics of AlGaAs heterojunction bipolar transistors,” Electron. Commun. Jupun, vol. 71, Part 2, pp.102-108, Mar. 1988.
    • (1988) Electron. Commun. Jupun , vol.71 , pp. 102-108
    • Takano, C.1    Taira, K.2    Kawai, H.3    Arai, M.4
  • 90
    • 84916405372 scopus 로고
    • Doping effects and compositional grading in Al, Ga1-x, As heterojunction bipolar transistors
    • July
    • N. Chand and H. Morkoq, “Doping effects and compositional grading in Al, Ga1-x, As heterojunction bipolar transistors,” IEEE Trans.Electron Devices, vol. ED-31, pp. 853-860, July 1984.
    • (1984) IEEE Trans.Electron Devices , vol.ED-31 , pp. 853-860
    • Chand, N.1    Morkoq, H.2
  • 91
    • 36549093871 scopus 로고
    • Thermal relaxation of pseudomorphic Si-Ge superlattices by enhanced diffusion and dislocation multiplication
    • S.S.Iyer and F. K. Legoues, “Thermal relaxation of pseudomorphic Si-Ge superlattices by enhanced diffusion and dislocation multiplication,” J. Appl. Phys., vol. 65, pp. 4693-4698, 1989.
    • (1989) J. Appl. Phys. , vol.65 , pp. 4693-4698
    • Iyer, S.S.1    Legoues, F.K.2
  • 92
    • 0022723607 scopus 로고
    • A simple regional analysis of transit times in bipolar transistors
    • May
    • J. J. H. van den Biesen, “A simple regional analysis of transit times in bipolar transistors,” Solid-State Electron., vol. 29, pp. 529-534, May 1986.
    • (1986) Solid-State Electron. , vol.29 , pp. 529-534
    • van den Biesen, J.J.H.1
  • 93
    • 0022162070 scopus 로고
    • Two integral relations pertaining to the electron transport through a bipolar transistor with a non-uniform energy gap in the base region
    • Nov
    • H. Kroemer, “Two integral relations pertaining to the electron transport through a bipolar transistor with a non-uniform energy gap in the base region,” Solid-state Electron., vol. 28. pp. 1101-1103, Nov. 1985.
    • (1985) Solid-state Electron. , vol.28 , pp. 1101-1103
    • Kroemer, H.1
  • 94
    • 0023573563 scopus 로고
    • Silicon-germanium base heterojunction bipolar transistors by molecular beam epitaxy
    • S. S. Iyer, G. L. Patton, S. L. Delage, S. Tiwari, and J. M. C.Stork, “Silicon-germanium base heterojunction bipolar transistors by molecular beam epitaxy,” in IEDM Tech. Dig., 1987, pp. 874-876.
    • (1987) IEDM Tech. Dig. , pp. 874-876
    • Iyer, S.S.1    Patton, G.L.2    Delage, S.L.3    Tiwari, S.4    Stork, J.M.C.5
  • 95
    • 0023994622 scopus 로고
    • Silicon-germanium-base heterojunction bipolar transistors by molecular beam epitaxy
    • Apr
    • G. L. Patton, S. S. Iyer, S. L. Delage, S. Tiwari, and J. M. C.Stork, “Silicon-germanium-base heterojunction bipolar transistors by molecular beam epitaxy,” IEEE Electron Device Lett., vol. 9, pp. 165-167, Apr. 1988.
    • (1988) IEEE Electron Device Lett. , vol.9 , pp. 165-167
    • Patton, G.L.1    Iyer, S.S.2    Delage, S.L.3    Tiwari, S.4    Stork, J.M.C.5
  • 96
    • 0345682840 scopus 로고
    • Ge, Si, strained-layer heterostructure bipolar transistors
    • Mar
    • H. Temkin, J. C. Bean, A. Antreasyan, and R. Leibenguth, “Ge, Si, - strained-layer heterostructure bipolar transistors,” Appl. Phys. Lett., vol. 52, pp. 1089-1091, Mar. 1988.
    • (1988) Appl.Phys. Lett. , vol.52 , pp. 1089-1091
    • Temkin, H.1    Bean, J.C.2    Antreasyan, A.3    Leibenguth, R.4
  • 97
    • 0005942941 scopus 로고
    • Secondary implantation of Sb into Si molecular beam epitaxy
    • H. Jorke, H.-J. Herzog, and H. Kibbel, “Secondary implantation of Sb into Si molecular beam epitaxy,” Appl. Phys. Lett., pp. 511-513, 1985.
    • (1985) Appl. Phys. Lett. , pp. 511-513
    • Jorke, H.1    Herzog, H.-J.2    Kibbel, H.3
  • 98
    • 29044439635 scopus 로고    scopus 로고
    • Highly activated shallow Ga profiles in silicon obtained by implantation and rapid thermal annealing
    • H. B. Harrison, S. S. Iyer. G. A. Sai-Halasz, and S. A. Cohen. “Highly activated shallow Ga profiles in silicon obtained by implantation and rapid thermal annealing,” Appl. Pkys. Lett., vol. 51
    • Appl. Pkys. Lett. , vol.51
    • Harrison, H.B.1    Iyer, S.S.2    Sai-Halasz, G.A.3    Cohen, S.A.4
  • 99
    • 0345525032 scopus 로고
    • Low-temperature deposition of high-quality silicon dioxide by plasma-enhanced chemical vapor deposition
    • J. Batey and E. Tierney, ”Low-temperature deposition of high-quality silicon dioxide by plasma-enhanced chemical vapor deposition,” J. Appl. Phys., vol. 60, pp. 3136-3146, 1986.
    • (1986) J. Appl. Phys. , vol.60 , pp. 3136-3146
    • Batey, J.1    Tierney, E.2
  • 100
    • 84939377328 scopus 로고    scopus 로고
    • Si,;i-, Ge, base HBTs with boron doped bases
    • to be published.
    • R. C. Mcintosh, G. L. Patton, and S. S. Iyer, “Si,;i-, Ge, baseHBTs with boron doped bases,” to be published.
    • Mcintosh, R.C.1    Patton, G.L.2    Iyer, S.S.3
  • 101
    • 0024170244 scopus 로고
    • Si/SiGe heterojunction bipolartransistor with graded gap SiGe base made by molecular beam epitaxy
    • P. Narozny, M. Hamacher, H. Dambkes, H. Kibbel, and E. Kasper, “Si/SiGe heterojunction bipolar transistor with graded gap SiGe base made by molecular beam epitaxy,” in IEDM Tech. Dig., 1988, pp.
    • (1988) IEDM Tech. Dig. , pp. 562-565
    • Narozny, P.1    Hamacher, M.2    Dambkes, H.3    Kibbel, H.4    Kasper, E.5
  • 103
    • 0024959437 scopus 로고
    • Si/SiGe HBT with base doping highly exceeding emitter doping concentration
    • H. U. Schreiber, B. G. Bosch, E. Kasper, and H. Kibbel, “Si/SiGe HBT with base doping highly exceeding emitter doping concentration,” Electron. Lett., vol. 25, pp. 185–186, 1989.
    • (1989) Electron. Lett , vol.25 , pp. 185-186
    • Schreiber, H.U.1    Bosch, B.G.2    Kasper, E.3    Kibbel, H.4
  • 104
    • 0024611641 scopus 로고
    • Si/Si1-xGexheterojunction bipolar transistors produced by limited reaction processing
    • Feb.
    • C. A. King et al., “Si/Si1-xGex heterojunction bipolar transistors produced by limited reaction processing,” IEEE Electron Device Lett., vol. 10, pp. 52–54, Feb. 1989.
    • (1989) IEEE Electron Device Lett , vol.10 , pp. 52-54
    • King, C.A.1
  • 105
    • 0024176683 scopus 로고
    • Si/Si1-xGex heterojunction bipolar transistors fabricated by limited reaction processing
    • J. F. Gibbons et al., “Si/Si1-xGex heterojunction bipolar transistors fabricated by limited reaction processing,” in IEDM Tech. Dig., 1988, pp. 566–569.
    • (1988) IEDM Tech. Dig , pp. 566-569
    • Gibbons, J.F.1
  • 106
    • 0024913104 scopus 로고
    • SiGe-base, poly-emitter heterojunction bipolar transistors
    • G. L. Patton et al., “SiGe-base, poly-emitter heterojunction bipolar transistors.” in Symp. VLSI Technol. Dig. Tech. Papers, 1989.
    • (1989) Symp. VLSI Technol. Dig. Tech. Papers
    • Patton, G.L.1
  • 108
    • 0024178935 scopus 로고
    • High performance Si and SiGe-base PNP transistors
    • D. L. Harame et al., “High performance Si and SiGe-base PNP transistors,” in IEDM Tech. Dig., 1988, pp. 889–891.
    • (1988) IEDM Tech. Dig , pp. 889-891
    • Harame, D.L.1
  • 109
    • 0022152068 scopus 로고
    • The bipolar inversion channel field effect transistor (BICFET)μA new field-effect solid state device: Theory and structure
    • Nov.
    • G. W. Taylor and J. G. Simmons, “The bipolar inversion channel field effect transistor (BICFET)—A new field-effect solid state device: Theory and structure,” IEEE Trans. Electron Devices, vol. ED-32, pp. 2345–2367, Nov. 1985.
    • (1985) IEEE Trans. Electron Devices , vol.ED-32 , pp. 2345-2367
    • Taylor, G.W.1    Simmons, J.G.2
  • 110
    • 0022149563 scopus 로고
    • Small signal model and high frequency performance of the BICFET
    • Nov.
    • “Small signal model and high frequency performance of the BICFET,” IEEE Trans. Electron Devices, vol. ED-32. pp. 2368–2377, 2377, Nov. 1985.
    • (1985) IEEE Trans. Electron Devices , vol.ED-32 , pp. 2368-2377
    • Taylor, G.W.1    Simmons, J.G.2
  • 111
    • 0024177907 scopus 로고
    • Fabrication of a p-channel channel BICFET in the GexSi1-x/Si system
    • R. C. Taft, J. D. Plummer, and S. S. Iyer, “Fabrication of a p-channel channel BICFET in the Ge x Si 1-x/Si system,- in IEDM Tech. Dig.1988, pp. 570–573.
    • (1988) IEDM Tech. Dig. , pp. 570-573
    • Taft, R.C.1    Plummer, J.D.2    Iyer, S.S.3
  • 112
    • 0024478803 scopus 로고
    • Demonstration of a p-channel BICFET in the Gex Si1-x/Si system
    • Jan.
    • _, “Demonstration of a p-channel BICFET in the Ge x Si 1-x/Si system,” IEEE Electron Device Lett., vol. 10, pp. 14–16, Jan. 1989.
    • (1989) IEEE Electron Device Lett , vol.10 , pp. 14-16
    • Taft, R.C.1    Plummer, J.D.2    Iyer, S.S.3
  • 113
    • 0023961093 scopus 로고
    • Demonstration of a p-channel GaAs/AlGaAs BICFET
    • Feb.
    • G. W. Taylor et al., “Demonstration of a p-channel GaAs/AlGaAs BICFET,” IEEE Electron Device Lett., vol. 9, pp. 84–86, Feb. 1988.
    • (1988) IEEE Electron Device Lett , vol.9 , pp. 84-86
    • Taylor, G.W.1
  • 114
    • 84915345309 scopus 로고
    • A p-channel BICFET in the InGaAs/InAlAs material system
    • June
    • M. S. Lebby et al., “A p-channel BICFET in the InGaAs/InAlAs material system,” IEEE Electron Device Lett., vol. 9, pp. 278–280. June 1988.
    • (1988) IEEE Electron Device Lett , vol.9 , pp. 278-280
    • Lebby, M.S.1
  • 115
    • 0022919395 scopus 로고
    • Bipolar trends
    • T. H. Ning and D. D. Tang, “Bipolar trends,” IEEE Proc., vol. 74, pp. 1669–1677, 1986.
    • (1986) IEEE Proc , vol.74 , pp. 1669-1677
    • Ning, T.H.1    Tang, D.D.2
  • 116
    • 0024717495 scopus 로고
    • A submicron high performance bipolar technology
    • T. C. Chen et al., “A submicron high performance bipolar technology,” IEEE Electron Device Lett., vol. 10, 1989.
    • (1989) IEEE Electron Device Lett , vol.10
    • Chen, T.C.1
  • 117
    • 0023595886 scopus 로고
    • Prospects for a hetero-structure bipolar transistor using a silicon-germanium alloy
    • C. Smith and A. D. Welbourn, “Prospects for a hetero-structure bipolar transistor using a silicon-germanium alloy,” Proc. IEEE 1987 Bipolar Circuits and Technol. Meeting, 1987, pp. 57–64.
    • (1987) Proc. IEEE 1987 Bipolar Circuits and Technol. Meeting , pp. 57-64
    • Smith, C.1    Welbourn, A.D.2
  • 118
    • 84939385688 scopus 로고
    • Paper presented at 3rd Int. Symp. Si MBE, to appear in
    • J. Hoyt et al., Paper presented at 3rd Int. Symp. Si MBE, to appear in Thin Solid Films, 1989.
    • (1989) Thin Solid Films
    • Hoyt, J.1
  • 119
    • 0024628426 scopus 로고
    • pnp Heterojunction bipolar transistors with buried subcollector layers
    • B. Bayraktaroglu and S. A. Lambert, “pnp Heterojunction bipolar transistors with buried subcollector layers,” IEEE Electron Device Lett., vol. 10, pp. 121–123, 1989.
    • (1989) IEEE Electron Device Lett , vol.10 , pp. 121-123
    • Bayraktaroglu, B.1    Lambert, S.A.2
  • 121
    • 3042910520 scopus 로고
    • Band-gap gap shifts in silicon-germanium heterojunction bipolar transistors
    • J. C. Sturm, E. J. Prinz, P. M. Garone, and P. V. Schwartz, “Band-gap gap shifts in silicon-germanium heterojunction bipolar transistors,” Appl. Phys. Lett., vol. 54, pp. 2707–2709, 1989.
    • (1989) Appl. Phys. Lett , vol.54 , pp. 2707-2709
    • Sturm, J.C.1    Prinz, E.J.2    Garone, P.M.3    Schwartz, P.V.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.