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Volumn 36, Issue 9, 1989, Pages 1915-1922

Development and electrical properties of undoped polycrystalline silicon thin-film transistors

Author keywords

[No Author keywords available]

Indexed keywords

DISPLAY DEVICES--LIQUID CRYSTAL; INTEGRATED CIRCUITS; PHOTOCONDUCTIVITY; SEMICONDUCTING SILICON--CHARGE CARRIERS; SEMICONDUCTOR DEVICES, MOS;

EID: 0024739568     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.34270     Document Type: Article
Times cited : (232)

References (14)
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  • 3
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    • K.T.-Y. Kung and R. Reif, “Polycrystalline Si thin film transistors fabricated at <800°C; Effects of grain size and {110} texture,” J. Appl. Phys., vol. 62, pp. 1503–1509, 1987.
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  • 5
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    • Fabrication and properties of single, double, and triple gate polycrystalline silicon thin film transistors
    • R. E. Proano, R. J. Soave, and D. G. Ast, “Fabrication and properties of single, double, and triple gate polycrystalline silicon thin film transistors,” Materials Res. Soc. Symp. Proc., vol. 106, pp. 317—322, 1987.
    • (1987) Materials Res. Soc. Symp. Proc. , vol.106 , pp. 317-322
    • Proano, R.E.1    Soave, R.J.2    Ast, D.G.3
  • 6
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    • Laser-recrystallized silicon thin-film transistors with low leakage current and high switching ratio
    • Sept.
    • S. Seki, O. Kogure, and B. Tsujiyama, “Laser-recrystallized silicon thin-film transistors with low leakage current and high switching ratio,” IEEE Electron Device Lett., vol. EDL-8, pp. 425–427, Sept. 1987.
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  • 7
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    • (1965) Silicon Semiconductor Technology , pp. 160
    • Queiser, H.J.1
  • 8
    • 0020089602 scopus 로고
    • Conductivity behavior in polycrystalline silicon semiconductor thin film transistors
    • Feb.
    • J. Levinson et al., “Conductivity behavior in polycrystalline silicon semiconductor thin film transistors,” J. Appl. Phys., vol. 52, pp. 1193–1202, Feb. 1982.
    • (1982) J. Appl. Phys. , vol.52 , pp. 1193-1202
    • Levinson, J.1
  • 11
    • 0016597193 scopus 로고
    • The electrical properties of polycrystalline silicon films
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  • 12
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    • Nov.
    • C. H. Seager and G. E. Pike, “Grain boundary states and varistor behavior in silicon bicrystals,” Appl. Phys. Lett., vol. 35, pp. 709–711, Nov. 1979.
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  • 13
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    • Apr.
    • H. C. Card and E. Yang, “Electronic processes at grain boundaries in polycrystalline semiconductors under optical illumination,” IEEE Trans. Electron Devices, vol. ED-24, pp. 397–402, Apr. 1977.
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    • Card, H.C.1    Yang, E.2
  • 14
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    • A semi-empirical model for the field effect mobility of hydrogenated polycrystalline-silicon TFT's
    • May
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.