Progress in monitoring thin film thickness by use of quartz crystals

Thin Solid Films

Volumn 174, Issue PART 1, 1989, Pages 307-314

  Benes, E ^a   Schmid, M ^a   Thorn, G ^b  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b EVONIK INDUSTRIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM AND ALLOYS; COPPER AND ALLOYS; LEAD AND ALLOYS; QUARTZ;

FREQUENCY JUMPS; QUASIHARMONIC MODES;

FILMS;

EID: 0024704298     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(89)90907-3     Document Type: Article

References (12)

1. Verwendung von Schwingquarzen zur W�gung d�nner Schichten und zur Mikrow�gung
2. Long-Term Operation of Crystal Oscillators in Thin-Film Deposition
3. Mass determination with piezoelectric quartz crystal resonators
4. Linearity of a Heavily Loaded Quartz Crystal Microbalance