Monte Carlo Simulation of Ion Implantation into Two- and Three-dimensional Structures

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems

Volumn 8, Issue 5, 1989, Pages 450-459

  Hobler, Gerhard ^a   Selberherr, Siegfried ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MATHEMATICAL STATISTICS--MONTE CARLO METHODS;

2D SIMULATION; 3D SIMULATION; ION IMPLANTATION SIMULATION; ION/TARGET INTERACTION; MONTE CARLO SIMULATION;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0024665146     PISSN: 02780070     EISSN: 19374151     Source Type: Journal    
DOI: 10.1109/43.24873     Document Type: Article

References (17)

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