Equilibrium Carrier Density and Solubility of Antimony in Silicon

Journal of the Electrochemical Society

Volumn 136, Issue 4, 1989, Pages 1142-1146

  Nobili, D ^a   Angelucci, R ^b   Armigliato, A ^c   Landi, E ^c   Solmi, S ^c  

^a UNIVERSITY OF BOLOGNA   (Italy)

^b IBM T J WATSON RESEARCH CENTER   (United States)

^c CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON--DOPING; SOLID SOLUTIONS;

EQUILIBRIUM CARRIER DENSITY; SOLID SOLUBILITY;

ANTIMONY AND ALLOYS;

EID: 0024639685     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2096808     Document Type: Article

References (13)

1. F. A. Trumbore, Bell Syst. Tech. J., 39, 205 (1960).
2. J. J. Rohan, E. Pickering, and J. Kennedy, Journal of the Electrochemical Society, 106, 705 (1959).
3. C. D. Thurmond and M. Kowalchik, Bell. Syst. Tech. J., 39, 169 (1960).
4. F. A. Trumbore, P. E. Freeland, and R. A. Logan, Journal of the Electrochemical Society, 108, 458 (1961).
5. S. H. Song, T. Niimi, K. Kobayashi, and K. Kudo, Journal of the Electrochemical Society, 129, 841 (1982).
6. A. Armigliato, D. Nobili, P. Ostoja, M. Servidori, and S. Solmi Proceedings Series, Princeton, in, “Semiconductor Silicon.” H. R. Huff and E. Sirtl, Editors, p. 638, The Electrochemical Society Softbound NJ (1977).
7. A. Nylandsted Larsen, F. T. Pedersen, G. Weyer, R. Galloni, R. Rizzoli, and A. Armigliato, J. Appl. Phys., 59, 1908 (1986).
8. H. Bender, in “Microscopy of Semiconducting Materials 1985,” Institute of Physics Conference Series no. 76, p. 17, Institute of Physics and the Physics Society, London (1985).
9. R. W. Olesinski and G. J. Abbaschian, Bull. Alloy Phase Diagrams, 6, 445 (1985).
10. I. Barin and O. Knacke, “Thermochemical Properties of Inorganic Substances,” p. 659, Springer-Verlag, Berlin (1973).
11. R. A. Swalin, “Thermodynamics of Solids,” Chap. 8, John Wiley & Sons, Inc., New York (1970).
12. D. Nobili, in “Properties of Silicon,” EMIS Datareview Series no. 4, p. 394, INSPEC—Institution of Electrical Engineering (1988).
13. R. B. Fair, M. L. Manda, and J. J. Wortman, J. Mater. Res., 1, 705 (1986).