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Journal of Materials Science Letters
Volumn 8, Issue 1, 1989, Pages 98-101
Theoretical approach to chemical vapour deposition in the atomic system Ti-Si-C-CI-H
Author keywords

[No Author keywords available]
Indexed keywords

THERMODYNAMIC PROPERTIES; TITANIUM METALLOGRAPHY--PHASE DIAGRAMS;
EID: 0024302613     PISSN: 02618028     EISSN: 15734811     Source Type: Journal    
DOI: 10.1007/BF00720264     Document Type: Article
Times cited : (24)
References (26)
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  • 5
    • 84935023880 scopus 로고    scopus 로고
    • J. F. LARTIGUE, M. DUCARROIR and B. ARMAS, Proceedings of the 9th International Conference on CVD, 7–8 May 1984, Cincinnati, Ohio, USA, edited by D. Robinson, (Electrochemical Society) p. 561.
  • 6
    • 84934972788 scopus 로고    scopus 로고
    • D. P. STINTON, W. F. LACKEY, R. J. LAUF and T. M. BESMANN. Proc. Ceram. Eng. Sci.5 (July/August) (1984).
  • 7
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    • G. GARTNER, P. JANIEL and H. LYDTIN, Proceedings of the 6th European Conference on CVD, 29 March-3 April 1987, Jerusalem, edited by R. Porat, p. 319.
  • 8
    • 84934973969 scopus 로고    scopus 로고
    • M. IGNAT, P. METAIS, C. BERNARD and M. DUCARROIR, accepted in the MRS spring Meeting April 1988, Reno, Nevada, USA.
  • 9
    • 84935026785 scopus 로고    scopus 로고
    • C. E. BRUCKL, Technical Report AFML-TR-65-2, part II, Vol. VIII, December 1965.
  • 12
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    • J. L. RATLIFF and G. W. POWELL, Technical Report AFML-TR-70-42, March 1970.
  • 13
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    • R. HULTGREN, “Selected Values of the Thermodynamic Properties of Binary Alloys” (American Society for Metals, 1973).
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    • W. G. MOFFATT, “The Handbook of Binary Phase Diagrams” (Gernium, 1984).
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    • K. K. SCHWEITZER, Dissertation Thesis, Ludwig Universität München (1976).
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    • I. BARIN and O. KNACKE, “Thermochemical Properties of Inorganic Substances” (1973).
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    • J. F. MILLION-BRODAZ, Dissertation Thesis, Institut National Polytechnique de Grenoble (1987).
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    • SGTE data bank, THERMODATA domaine Universitaire Grenoble.
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    • 84934945804 scopus 로고    scopus 로고
    • L. KAUFMAN and H. BERNSTEIN, “Computer Calculation of Phase Diagram” (Academic, 1970).
  • 22
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.