Growth and characterization of aluminum nitride thin films for piezoelectric devices

Ultrasonics Symposium Proceedings

Volumn 2, Issue , 1988, Pages 673-676

  McCarron, K T ^a   Kline, G R ^a   Martin, J T ^a   Lakin, K M ^a  

^a IOWA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS--MANUFACTURE; ALUMINUM COMPOUNDS--THIN FILMS; MICROWAVE DEVICES; SPUTTERING; ULTRASONIC DEVICES--THIN FILMS;

ALUMINUM NITRIDE; COMMERCIAL MAGNETRON SPUTTERING; FUNDAMENTAL-MODE RESONATORS; MICROWAVE ACOUSTIC DEVICES; ULTRAHIGH VACUUM SYSTEMS;

PIEZOELECTRIC DEVICES;

EID: 0024177029     PISSN: 00905607     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)