Tester for the contact resistivity of self-aligned silicides

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1988, Pages 352-355

  Lynch, W T ^a   Ng, K K ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; SEMICONDUCTOR DEVICES, MOSFET--MEASUREMENTS;

CONTACT RESISTIVITY; CROSS-BRIDGE KELVIN RESISTOR; KELVIN TESTER; MOSFET INVERSION CHANNELS; SELF-ALIGNED SILICIDES;

ELECTRIC MEASUREMENTS;

EID: 0024174388     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)