High performance LSI process technology: SST CBi-CMOS

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1988, Pages 760-763

  Kobayashi, Yoshiji ^a   Yamaguchi, Chikara ^a   Amemiya, Yoshihito ^a   Sakai, Tetsushi ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LOGIC DEVICES--GATES; OSCILLATORS; SEMICONDUCTOR DEVICES, MOS; TRANSISTORS, BIPOLAR;

BICMOS GATE FABRICATION; CMOS RING OSCILLATOR; PROPAGATION DELAY MEASUREMENT; SST CBI-CMOS PROCESS; SUPER SELF-ALIGNED TECHNOLOGY (SST);

INTEGRATED CIRCUITS, LSI;

EID: 0024170929     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)