Sub-30 psec Si bipolar LSI technology

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1988, Pages 744-747

  Gomi, Takayuki ^a   Miwa, Hiroyuki ^a   Sasaki, Hiromi ^a   Yamamoto, Hiroshi ^a   Nakamura, Minoru ^a   Kayanuma, Akio ^a  

^a SONY CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS, DIGITAL; LOGIC CIRCUITS; TRANSISTORS, BIPOLAR;

COLLECTOR ION IMPLANTATION; EMITTER/BASE SELF-ALIGNED TECHNOLOGY; POLYSILICON DOUBLE DIFFUSION; SHALLOW-JUNCTION TECHNOLOGY; SILICON BIPOLAR LSI TECHNOLOGY;

INTEGRATED CIRCUITS, LSI;

EID: 0024167186     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)