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Volumn 28, Issue , 1988, Pages 137-151
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XPS investigation on the growth model of a SiNx and silicon and nitrogen chemical bondings
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Author keywords
[No Author keywords available]
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Indexed keywords
CERAMIC MATERIALS--THIN FILMS;
SPECTROSCOPY, PHOTOELECTRON--APPLICATIONS;
FILMS - STRUCTURE;
SPECTROSCOPY, PHOTOELECTRON - APPLICATIONS;
CHEMICAL STRUCTURE;
DUAL ION BEAM SPUTTERING;
BINDING ENERGY;
CHEMICAL BONDINGS;
GROWTH MODEL;
RANDOM BONDING MODEL;
STOICHIOMETRIC STATISTICAL MODEL;
SILICON NITRIDE;
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EID: 0024163957
PISSN: 00181536
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (50)
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References (19)
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