GHz on-silicon-wafer probing calibration methods

Volumn , Issue , 1988, Pages 154-157

  Fraser, Arthur ^a   Gleason, Reed ^a   Strid, E W ^a  

^a Cascade Microtech Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT TESTING -- MICROWAVES; SAPPHIRE; SEMICONDUCTING SILICON; STANDARDS;

BACKSIDE COLLECTOR DEVICES; CALIBRATION STANDARDS; CALIBRATION/CORRECTION TECHNIQUES; ON-SILICON-WAFER PROBING; S PARAMETER MEASUREMENTS;

ELECTRIC MEASUREMENTS;

EID: 0024144454     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)