Silicon in mechanical sensors

Journal of Physics E: Scientific Instruments

Volumn 21, Issue 12, 1988, Pages 1114-1128

  Greenwood, J C ^a  

^a NORTEL NETWORKS   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MECHANICAL SENSORS; MECHANICAL STABILITY; SURFACE MICROSTRUCTURES;

SEMICONDUCTING SILICON--APPLICATIONS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICES--SENSORS; STRAIN GAGES--MATERIALS; STRENGTH OF MATERIALS;

SENSORS;

EID: 0024137465     PISSN: 00223735     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3735/21/12/001     Document Type: Article

References (157)

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29. Design Considerations for Silicon Circular Diaphragm Pressure Sensors