SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Thin Solid Films

Volumn 167, Issue 1-2, 1988, Pages 175-186

Cathodic arc plasma deposition technology

(1) Randhawa, H a

a Vac Tec Systems Inc (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; IONS; PLASMAS--APPLICATIONS; PROTECTIVE COATINGS;

CATHODIC ARC PLASMA DEPOSITION; HIGH ENERGY IONS; THIN FILM DEPOSITION;

FILMS;

EID: 0024129295 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/0040-6090(88)90494-4 Document Type: Article

Times cited : (98)

References (24)

1
- 0023440298
- A review
- (1987) Surf. Coat. Technol. , vol.31 , pp. 303
- Randhawa¹ Johnson²

2
- 0001324085
- TiN-coated high-speed steel cutting tools
- (1986) Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films , vol.4 , Issue.6 , pp. 2755
- Randhawa¹

3
- 0003644433
- R.F. Bunshah, Noyes
- (1982) Deposition Technologies for Films and Coatings
- Bunshah¹

4
- 0003494870
- Academic Press, New York
- (1978) Thin Film Processes
- Vossen¹ Kem²

5
- 0003644435
- R.F. Bunshah, Noyes
- (1982) Deposition Technologies for Films And Coatings
- Thornton¹

6
- 0021470161
- (1984) Thin Solid Films , vol.118 , pp. 279
- Sproul¹

7
- 84919126213
- (1987) Society of Vacuum Coaters
- Johnson¹

8
- 84915899833
- (1984) U.S.A. Patent 4, 430, 184
- Mullarie¹

9
- 33644618706
- (1978) Sov. Tech. Phys. Lett. , vol.3 , pp. 525
- Aksenon¹ Andreen²

10
- 0003440353
- J.M. Lafferty, Wiley-Interscience, New York
- (1980) Arc Cathode Phenomena , pp. 127-128
- Harris¹

11
- 0016331536
- (1974) J. Appl. Phys. , vol.45 , pp. 5235
- Kimblin¹

12
- 0017994632
- (1978) J. Appl. Phys. , vol.49 , pp. 3821
- Tuma¹ Chen² Davies³

13
- 0017515533
- (1978) Sov. Phys. Tech. Phys. , vol.22 , pp. 858
- Lumeer¹ Padalka² Khoroshikh³

14
- 0018986466
- (1981) Physica C , vol.104 , pp. 91
- Daalder¹

15
- 0018506413
- (1979) J. Phys. D , vol.12 , pp. 1293
- Miller¹

16
- 84919155354
- Proc. Int. Conf. on Metallurgical Coatings
- San Diego, CA, March 1987
- (1987) Thin Solid Films , vol.153 , pp. 209
- Randhawa¹

17
- 0004015318
- Cathode erosion of metal vapor arcs in vacuum
- Technische Hugelschol, Eindhoven
- (1978) Ph.D. Thesis
- Daalder¹

18
- 84919111893
- Anaheim, CA
- (1987) American Vacuum Society Meet.
- Randhawa¹

19
- 84919126212
- Apparatus for metal evaporation coating
- (1976) U.S. Patent 3,793,179
- Sablev¹ Atamansky² Nikolaevich³ Dolotov⁴ Latseenko⁵ Lanev⁶ Usov⁷

20
- 84908355131
- Arc deposition process and apparatus
- (1971) U.S. Patent 3,625,848
- Snaper¹

21
- 0016331536
- (1974) J. Appl. Phys. , vol.45 , pp. 5235
- Kimblin¹

22
- 0023452585
- Zirconium nitride films prepared by cathodic arc plasma deposition process
- (1987) Surface and Coatings Technology , vol.33 , pp. 53
- Randhawa¹ Johnson²

23
- 84919126211
- Orlando, FL
- (1987) ASM Int. Strategic Machining and Materials Conf.
- Randhawa¹

24
- 84919112824
- (1987) Res, Dev. , vol.2 , pp. 174
- Randhawa¹ Johnson²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.