Mechanisms of anodic bonding of silicon to pyrex glass.

Volumn , Issue , 1988, Pages 109-110

  Albaugh, Kevin B ^a   Cade, Paul E ^a   Rasmussen, Don H ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING -- DISSIMILAR MATERIALS; ELECTROCHEMISTRY; GLASS; SENSORS -- MATERIALS;

ANODIC BONDING; CURRENT VS. TIME TRANSIENT; ELECTROCHEMICAL BOND FORMATION; PYREX GLASS;

SILICON AND ALLOYS;

EID: 0024126306     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)