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Volumn 35, Issue 12, 1988, Pages 2160-2169

Mechanical Stress as a Function of Temperature in Aluminum Films

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING FILMS;

EID: 0024123113     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.8790     Document Type: Article
Times cited : (144)

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