Synthesis of High‐Quality Ultra‐Thin Gate Oxides for ULSI Applications

AT&T Technical Journal

Volumn 67, Issue 6, 1988, Pages 155-174

  Roy, Pradip K ^a   Sinha, Ashok K ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE; OXIDES--THIN FILMS; SILICA--THIN FILMS;

SCALED DOWN DEVICES; STACKED SILICON STRUCTURE; THIN GATE OXIDES; ULTRA LARGE SCALE INTEGRATION; VIRTUAL INTERFACES;

SEMICONDUCTOR DEVICES, MOSFET;

EID: 0024108368     PISSN: 87562324     EISSN: 15387305     Source Type: Journal    
DOI: 10.1002/j.1538-7305.1988.tb00072.x     Document Type: Article

References (33)

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