Ultraclean gas delivery systems - Part 1: ULSI fab must begin with ultraclean nitrogen system

Microcontamination

Volumn 6, Issue 11, 1988, Pages 49-54

  Sugiyama, Kazuhiko ^a   Ohmi, Tadahiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AIR--SEPARATION; INTEGRATED CIRCUIT MANUFACTURE--PROTECTIVE ATMOSPHERES; INTEGRATED CIRCUITS, VLSI--MANUFACTURE; LIQUIDS--FILTRATION; REFRIGERATING MACHINERY--CLEANING;

AIR LIQUEFICATION SEPARATION UNITS; CLEANROOMS; ULTRACLEAN GAS DELIVERY SYSTEMS;

GASES, INERT;

EID: 0024106358     PISSN: 0738713X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)