Conditions for Thermal Nitridation of Si in N2-O2 Mixtures

Journal of the Electrochemical Society

Volumn 135, Issue 11, 1988, Pages 2803-2807

  Rose, K ^b  

^a INTEL CORPORATION   (United States)

^b RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT TREATMENT--NITRIDING; SILICON AND ALLOYS--HEAT TREATMENT; THERMODYNAMICS;

ACTIVE OXIDATION; STABILITY FIELD DIAGRAMS; THERMAL NITRIDATION;

INTEGRATED CIRCUITS, VLSI;

EID: 0024105064     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2095436     Document Type: Article

References (23)

1. T. Ito, S. Hijiya, T. Nozaki, H. Arakawa, M. Shinoda, and Y. Fukukawa, Journal of the Electrochemical Society, 125, 449 (1978).
2. S. P. Murarka, C. C. Chang, and A. C. Adams, Journal of the Electrochemical Society, 126, 996 (1979).
3. T. Ito, I. Kato, T. Nozaki, T. Nakamura, and H. Ishikawa, Appl. Phys. Lett., 38, 370 (1981).
4. R. V. Giridhar and K. Rose, Appl. Phys. Lett., 45, 578 (1984).
5. A. Atkinson, P. J. Leatt, A. J. Moulson, and E. W. Roberts, J. Mater. Sci., 9, 981 (1974).
6. R. G. Frieser, Journal of the Electrochemical Society, 115, 1092 (1968).
7. H. Nakamura, M. Kaneko, S. Matsumoto, S. Fujita, and A. Sasaki, Appl. Phys. Lett., 43, 691 (1983).
8. S. I. Raider, R. Flitsch, J. A. Aboaf, and W. A. Pliskin, Journal of the Electrochemical Society, 123, 560 (1976).
9. K. Blegen, in “Special Ceramics 6,” P. Popper, Editor, British Ceramic Research Association, England (1975).
10. JANAF Thermodynamic Tables, 2nd ed., D. R. Stull, Editor, Thermal Research Laboratories, Dow Chemical Co., Midland, MI, USA (1971).
11. S. C. Singhal, Ceramurgia International, 2, 123 (1976).
12. M. Futagami and M. Hamazaki, Jpn. J. Appl. Phys., 17, 1343 (1978).
13. K. J. Huttinger, High Temp.-High Pressures, 2, 89 (1970).
14. C. Wagner, J. Appl. Phys., 29, 1295 (1958).
15. J. W. Hinze and H. C. Graham, Journal of the Electrochemical Society, 123, 1066 (1976).
16. W. C. Tripp and H. C. Graham, J. Am. Ceram. Soc., 59, 389 (1976).
17. K. Blegen, “Equilibrium and Kinetics in the Systems Si-N, Si-O-N, and Si-C-O-N,” Norges Tekniske Hogskole, Universitetet I Trondheim (1976).
18. M. N. Rahaman and A. J. Moulson, J. Mater. Sci., 16, 2319 (1981
19. H. Dervisbegovic and F. J. Riley, J. Mater. Sci., 16, 1945 (1981).
20. S. I. Raider, R. A. Gdula, and J. R. Petrak, Appl. Phys. Lett., 27, 150(1975).
21. S. S. Lin, J. Am. Ceram. Soc., 58, 271 (1975).
22. D. Campos-Loriz and F. J. Riley, J. Mater. Sci., 11, 195 (1976).
23. J. A. Nemetz and R. E. Tressler, Solid State Technol., 2, 79 (1983).