Formation of superconducting bi-sr-ca-cu-o thin films with controlled c-axis lattice spacings by multitarget sputtering

Japanese Journal of Applied Physics

Volumn 27, Issue 10 A, 1988, Pages L1883-L1886

  Adachi, Hideaki ^a   Kohiki, Shigemi ^a   Setsune, Kentaro ^a   Mitsuyu, Tsuneo ^a   Wasa, Kiyotaka ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

Bi Sr Ca Cu O; High 7c; Multitarget; Oxide superconductor; Sputtering; Superconductivity; Thin film

Indexed keywords

CERAMIC MATERIALS--THIN FILMS; FILMS--SUPERCONDUCTING; OXIDES;

BISMUTH STRONTIUM CALCIUM COPPER OXIDES; MULTITARGET SPUTTERING; OXIDE SUPERCONDUCTORS;

SUPERCONDUCTING MATERIALS;

EID: 0024089830     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.27.L1883     Document Type: Article

References (6)

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