A laser-generated plasma source for x-ray lithography and VLSI

Journal of Physics E: Scientific Instruments

Volumn 21, Issue 10, 1988, Pages 959-965

  Michette, A G ^a   Rogoyski, A M ^a   Burge, R E ^a  

^a KING'S COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

LASER-GENERATED PLASMA SOURCE; PROTOTYPE SOURCE; SOFT X-RAYS; ULTRASOFT X-RAYS; X-RAY LITHOGRAPHY;

INTEGRATED CIRCUITS, VLSI--LASER APPLICATIONS; LASERS, EXCIMER--APPLICATIONS; LITHOGRAPHY--LASER APPLICATIONS; X-RAYS--MEASUREMENTS;

PLASMAS;

EID: 0024089054     PISSN: 00223735     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3735/21/10/011     Document Type: Article

References (14)