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Volumn 161, Issue C, 1988, Pages 117-122
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Characterizing the hardness and modulus of thin films using a mechanical properties microprobe
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM COMPOUNDS;
ELASTICITY;
MICROINDENTATION SYSTEM;
MICROPROBE;
SAPPHIRE;
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EID: 0024053358
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/0040-6090(88)90242-8 Document Type: Article |
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Times cited : (63)
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References (8)
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