Nitrobenzyl Ester Chemistry for Polymer Processes Involving Chemical Amplification

Macromolecules

Volumn 21, Issue 7, 1988, Pages 2001-2006

  Houlihan, F M ^a   Shugard, A ^a   Gooden, R ^a   Reichmanis, E ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACIDS - EVALUATION; MICROELECTRONICS - MATERIALS; POLYMERS;

CHEMICAL AMPLIFICATION; NITROBENZYL ESTER CHEMISTRY; PHOTOGENERATORS; TOLUENESULFONIC ACID; TOSYLATE ESTERS;

ESTERS;

EID: 0024051298     PISSN: 00249297     EISSN: 15205835     Source Type: Journal    
DOI: 10.1021/ma00185a019     Document Type: Article

References (21)

1. Horspool, W. M. Synthetic Organic Photochemistry; Plenum: New York, 1984; p 375.
2. Willson, C. G.; Ito, H.; Frechet, J. M. J.; Tessier, T. G.; Houlihan, F. M. J. Electrochem. Soc. 1986, 133 (1), 181.
3. Reichmanis, E.; Wilkins, C. W.; Chandross, E. A. J. Vac. Sci. Technol. 1981, 19, 1338.
4. Ito, H.; Willson, C. G.; Frechet, J. M. J. U.S. Patent 4 491 628, 1985.
5. Frechet, J. M. J.; Eichler, E.; Ito, H.; Willson, C. J. Polymer 1983, 24, 995. Ito, H.; Willson, C. G.; Ito, H.; Frechet, J. M. J.; Farral, M. J.; Eichler, E. Macromolecules 1983, 16, 510.
6. Frechet, J. M. J.; Bouchard, F.; Eichler, E.; Houlihan, F. M.; Iizawa, T.; Kryczka, B.; Willson, C. G. Polym. J. 1987, 19 (1), 31.
7. Reichmanis, E.; Gooden, R.; Wilkins, C. W., Jr.; Schonhom, H. J. Polym. Sci., Polym. Chem. Ed. 1983, 21, 1075.
8. Reichmanis, E.; Smith, B. C.; Gooden, R. J. Polym. Sci., Polym. Chem. Ed. 1985, 23, 1.
9. Reichmanis, E.; Wilkins, C. W., Jr.; Price, D. A.; Chandross, E. A. J. Electrochem. Soc. 1983, 103 (6), 1433.
10. Houlihan, F. M.; Frechet, J. M. J.; Willson, C. G. Polym. Mat. Sci. Eng. 1985, 53, 268.
11. Berner, G.; Rist, G. Latent Sulfonic Acids; Radcure Europe: Basel, Switzerland, 1985; p 446.
12. Houlihan, F.; Bouchard, F.; Frechet, J. M. J.; Willson, C. G. Can. J. Chem. 1985, 63, 153.
13. Bottorff, E. M., Eli Lily and Co. U.S. Patent 3 745 188, 1973.
14. Beilstein 1931, 6, 224.
15. Dickinson, W. B. J. Am. Chem. Soc. 1964, 86, 3580.
16. Streitwieser, A. Chem. Rev. 1956, 56, 613.
17. Ellis, C.; Wells, A. A. The Chemical Action of Ultraviolet Rays; Reinhold: New York, 1941; p 248.
18. Barltrop, J. A.; Coyle, J. D. Excited States in Organic Chemistry; Wiley: London, 1975; p 159.
19. Srinivasan, R.; Braren, B.; Dreyfus, R. W.; Hadel, L.; Seeger, D. E. J. Opt. Soc. Am. B.: Opt. Phys. 1986, 3, 785.
20. Turro, N. J.; Aikawa, M.; Butcher, J. A.; Griffin, G. W. J. Am. Chem. Soc. 1980, 102, 5128.
21. Kuchler, L.; Patat, F. Z. Elektrochem. 1936, 42, 529.