Automated interface recognition in auger sputter depth profiling

Surface and Interface Analysis

Volumn 12, Issue 1, 1988, Pages 21-26

  Hill, Malcolm D ^a  

^a MARTLESHAM HEATH   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; ION BEAMS; SEMICONDUCTOR DEVICES--HETEROJUNCTIONS; SPECTROSCOPY, AUGER ELECTRON; SPUTTERING;

ABSORBED ELECTRON CURRENT; AUGER SPUTTER DEPTH PROFILING; AUTOMATED INTERFACE RECOGNITION; HETEROINTERFACES; ION BEAM IRRADIATION;

SURFACES;

EID: 0024037501     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.740120107     Document Type: Article

References (8)

1. Simultaneous electron and x-ray analysis and its application in corrosion science
2. On the influence of crater edges and neutral beam component on impurity profiles from raster scanning SIMS