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Surface and Interface Analysis

Volumn 12, Issue 2, 1988, Pages 65-77

Ion bombardment effects on the near‐surface composition during sputter profiling

(1) Lam, N Q a

a ARGONNE NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; IONS; SPUTTERING; SURFACES--RADIATION EFFECTS;

DISPLACEMENT MIXING; ION BOMBARDMENT EFFECTS; NEAR-SURFACE COMPOSITION; RADIATION-ENHANCED DIFFUSION; RADIATION-INDUCED SEGREGATION; SPUTTER DEPTH PROFILING;

METALS AND ALLOYS;

EID: 0024037318 PISSN: 01422421 EISSN: 10969918 Source Type: Journal
DOI: 10.1002/sia.740120202 Document Type: Article

Times cited : (70)

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