Design and Calibration of a Microfabricated FloatingElement Shear Stress Sensor

IEEE Transactions on Electron Devices

Volumn 35, Issue 6, 1988, Pages 750-757

  Schmidt, Martin A ^a   Senturia, Stephen D ^a   Howe, Roger T ^a   Haritonidis, Joseph H ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

STRESSES - SENSORS;

FLOATING ELEMENT SENSOR; MICROFABRICATION; SHEAR-STRESS SENSOR;

SENSORS;

EID: 0024034041     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.2527     Document Type: Article

References (13)

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