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Journal of Non-Crystalline Solids

Volumn 102, Issue 1-3, 1988, Pages 130-135

Crystallization kinetics of amorphous Si/SiO2 superlattice structures

(3) Persans, P D a Ruppert, A b Abeles, B b

a RENSSELAER POLYTECHNIC INSTITUTE (United States)

b EXXONMOBIL UPSTREAM RESEARCH COMPANY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; SILICA--THIN FILMS;

AMORPHOUS SILICON; CRYSTALLIZATION KINETICS; SILICON OXIDE;

SILICON AND ALLOYS;

EID: 0024017923 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/0022-3093(88)90123-8 Document Type: Article

Times cited : (54)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.