메뉴 건너뛰기




Volumn 11, Issue 8, 1988, Pages 414-420

Characterization of polyamic acid/polyimide films in the nanometric thickness range from spin‐deposited polyamic acid

(1)  Russat, Jean a  

a IBM   (France)

Author keywords

[No Author keywords available]

Indexed keywords

GOLD AND ALLOYS - SUBSTRATES; POLYIMIDES - THIN FILMS; SPECTROSCOPY, AUGER ELECTRON - APPLICATIONS; SPECTROSCOPY, ELECTRON - APPLICATIONS;

EID: 0024013799     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.740110803     Document Type: Article
Times cited : (61)

References (40)
  • 31
    • 84987198305 scopus 로고    scopus 로고
    • J. Vac. Sci. Technol. (submitted).
    • Russat, J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.