Specific Contact Resistivity of Metal-Semiconductor Contacts—A New, Accurate Method Linked to Spreading Resistance

IEEE Transactions on Electron Devices

Volumn 35, Issue 4, 1988, Pages 489-497

  Carver, Gary P ^a   Kopanski, Joseph J ^a   Novotny, Donald B ^a   Forman, Richard A ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Contact resistance; contact resistivity; contacts; integrated circuits; metal semiconductor contacts; Schottky barriers; Schottky diodes; silicon; specific contact resistivity; spreading resistance

Indexed keywords

ELECTRIC MEASUREMENTS - RESISTANCE; SEMICONDUCTING SILICON - CONTACT;

METAL-SEMICONDUCTOR CONTACTS; SEMICONDUCTOR SPREADING RESISTANCE; SPECIFIC CONTACT RESISTIVITY;

ELECTRIC CONTACTS, OHMIC;

EID: 0023999216     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.2483     Document Type: Article

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